Abstract: Described herein is a technique capable of improving the controllability of firm thickness distribution. According to one aspect of the technique, there is provided a substrate processing apparatus including: a process chamber; a first and a second gas supply system; an exhaust system; and a controller for controlling the first and the second gas supply system and the exhaust system to form a film. The first gas supply system includes: a first and a second storage part; a first gas supply port for supplying a gas stored in the first storage part from an outer periphery toward a center of a substrate; and a second gas supply for supplying the gas stored in the second storage part from the outer periphery along a direction more inclined toward the outer periphery than a direction from the outer periphery toward the center of the substrate.

Abstract: Described herein is a technique capable of improving the controllability of firm thickness distribution. According to one aspect of the technique, there is provided a substrate processing apparatus including: a process chamber; a first and a second gas supply system; an exhaust system; and a controller for controlling the first and the second gas supply system and the exhaust system to form a film. The first gas supply system includes: a first and a second storage part; a first gas supply port for supplying a gas stored in the first storage part from an outer periphery toward a center of a substrate; and a second gas supply for supplying the gas stored in the second storage part from the outer periphery along a direction more inclined toward the outer periphery than a direction from the outer periphery toward the center of the substrate.

Abstract: A hydraulic cylinder system 1 is provided with a plurality of cylinders 3a and 3b, valves 4a and 4b provided at each of the cylinders 3a and 3b for adjusting amounts of operating fluid into and out of the cylinders 3a and 3b, driving systems 5a and 5b having motors 6a and 6b provided at each of the valves 4a and 4b for driving the valves 4a and 4b, and a connecting member 8 for connecting the motors 6a and 6b of the driving systems 5a and 5b in a manner capable of interlocking with each other.

Abstract: A hydraulic cylinder system 1 is provided with a plurality of cylinders 3a and 3b, valves 4a and 4b provided at each of the cylinders 3a and 3b for adjusting amounts of operating fluid into and out of the cylinders 3a and 3b, driving systems 5a and 5b having motors 6a and 6b provided at each of the valves 4a and 4b for driving the valves 4a and 4b, and a connecting member 8 for connecting the motors 6a and 6b of the driving systems 5a and 5b in a manner capable of interlocking with each other.