Abstract: The present invention provides a sulfonium salt used in a resist composition that can give a pattern having a high resolution, especially an excellent rectangularity of a pattern form and a small roughness, while not readily generating a defect, in the photolithography using a high energy beam as a light source; a resist composition that contains the sulfonium salt; and a patterning process using this resist composition, wherein the sulfonium salt is shown by the following general formula (1a), wherein each of R and R0 independently represents a hydrogen atom, or a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 30 carbon atoms which may be optionally substituted by a heteroatom or interposed by a heteroatom.

Abstract: A sulfonium salt used in a resist composition which gives a pattern having a high resolution, and small roughness in the photolithography using a high energy beam as a light source, and further difficultly eluted in water in the immersion lithography, and a resist composition containing the sulfonium salt, and a patterning process using the resist composition, wherein the sulfonium salt is represented by the following general formula (1a), wherein R represents a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 30 carbon atoms at least one or more of the hydrogen atoms of which are substituted by a fluorine atom, R0 represents a hydrogen atom, or a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 30 carbon atoms which may be substituted by a halogen atom, or interposed by a heteroatom.

Abstract: A method for producing a purified naphthalenedicarboxylic acid includes steps of mixing a naphthalenedicarboxylic acid-containing material and an amine in a mixed liquid of water and an organic solvent to give a crystal of a naphthalenedicarboxylic acid amine salt; and obtaining a purified naphthalenedicarboxylic acid from the crystal of the naphthalenedicarboxylic acid amine salt, wherein (1) in the step of forming the naphthalenedicarboxylic acid amine salt by adding an amine to the slurry that contains water, an organic solvent and a naphthalenedicarboxylic acid, the amine addition rate is from 0.002 to 0.4 mol/min relative to one mol of the naphthalenedicarboxylic acid, or (2) an amine is added to the aqueous solution prepared by dissolving the naphthalenedicarboxylic acid amine salt in water, or to the liquid prepared through solid-liquid separation of the aqueous solution to insolubilize and precipitate the metal component, and the precipitated metal component is removed through solid-liquid separation.

Abstract: A vehicle charging equipment includes a charging equipment main body, a charging cable, a charge connector to be fitted to a vehicle-side connector and having a release button, a release button circuit to which voltage is applied from the vehicle to detect depression of the release button, a winding-up device to wind up the charging cable, a fit determination means for determining the fitting of the charge connector to the vehicle-side connector, and an automatic winding-up controller. The fit determination means includes a voltage detection unit and a fit determination portion, the voltage detection unit detecting voltage applied to the release button circuit to detect depression of the release button, and the fit determination portion determining the fitting of the vehicle-side connector based on the voltage detected. The automatic winding-up controller determines removal of the charge connector from the vehicle-side connector based on the determination by the fit determination means.

Abstract: A negative pattern is formed by applying a resist composition onto a substrate, prebaking, exposing to high-energy radiation, PEB, and developing the exposed resist film in an organic solvent developer to dissolve the unexposed region of resist film. The resist composition comprising a polymer adapted to form a lactone ring under the action of an acid so that the polymer may reduce its solubility in an organic solvent displays a high dissolution contrast. A fine hole or trench pattern can be formed therefrom.

Abstract: An inspection device that is capable of inspecting all heat-transfer-tube sealing portions in a steam generator and that is also capable of analyzing a defect shape is provided. An inspection device that employs the eddy-current flaw detection method to inspect the presence/absence of a defect in a welded portion (103) between a tube (101) and a tube plate (102) is provided with a main unit (41) that has a circular-column portion (41A), which is inserted into the tube (101), and a flange portion (41B), which is pressed against the tube plate (102), and that is rotatable with respect to the welded portion (103); a probe (42) that is disposed inside the main unit (41), that can be moved close to and away from the welded portion (103), and that detects a defect in the welded portion (103); and a pressing portion (44) that presses the probe (42) toward the welded portion.

Abstract: An aralkylcarbamate of imidazole base is effective as the quencher. In a chemically amplified positive resist composition comprising the carbamate, deprotection reaction of carbamate takes place by reacting with the acid generated upon exposure to high-energy radiation, whereby the composition changes its basicity before and after exposure, resulting in a pattern profile with advantages including high resolution, rectangular shape, and minimized dark-bright difference.

Abstract: A contactless receiver is provided with a receiving section and a rectification section. The receiving section has a resonant circuit including a resonant capacitor having a variable capacitance element formed with a ferroelectric material, a capacitance of the variable capacitance element changing according to a received voltage at a predetermined frequency, and a resonance coil connected to the resonant capacitor. The rectification section converts an alternating current voltage output from the receiving section into a direct current voltage.

Abstract: A brake apparatus includes: a master cylinder generating a master cylinder fluid pressure; a wheel brake device applying a braking force to the wheels; a control fluid pressure generation device including a fluid pressure control valve and a fluid pressure pump; an electric motor driving the fluid pressure pump; a control fluid pressure setting unit setting a control fluid pressure; wherein the control fluid pressure generation device rotates the electric motor to circulate a brake fluid and applies a control current to the fluid pressure control valve to thus generate the control fluid pressure in the fluid pressure control valve, and a target rotation number setting unit configured to calculate a pump-necessary discharge flow rate and a brake fluid amount, and set a target rotation number of the electric motor based on the pump-necessary discharge flow rate.

Abstract: An article conveyer belt assembly used for example, in a coin sorting device for positively pushing an article, such as a coin along a support surface is provided. A toothed belt has teeth for transmission of power by mounting a plurality of pushers on the belt with a connector removably mounted with a connecting body, a first holder and a second holder spaced a distance from each other to hold onto the conveyor belt. One of the first and second holders has a hook member to close a spaced opening at one end. The first and second holders are cantilevered to be mounted on a conveyor belt. At the other end of the connector body a pusher unit has a first shaft part and a second shaft part cantilevered from the connector body, with a hollow roller snap fitted on the first shaft part and the second shaft part.

Abstract: A plasma apparatus includes: a chamber which can be evacuated into vacuum; first electrode disposed within the chamber; a magnet mechanism having a magnet provided apart from and above the first electrode; a second electrode provided facing the first electrode; and a magnetic shield member provided in at least one of gaps between the first electrode and the magnet mechanism and between the first electrode and the second electrode.

Abstract: A radiation image pickup apparatus includes a base which transmits ultraviolet rays, a plurality of image pickup elements, a scintillator, at least one ultraviolet peelable adhesive arranged between the base and the image pickup elements so as to fix the base and the image pickup elements in a predetermined position with respect to each other, and a heat peelable adhesive arranged between the image pickup elements and the scintillators so as to fix the image pickup elements to the scintillator.

Abstract: A radiation detection apparatus includes a scintillator panel having a scintillator layer which converts radiation into light and a scintillator protective layer which protects the scintillator layer, and a sensor panel having a sensor array in which a plurality of photoelectric converters which detect light from the scintillator layer are arranged and a sensor protective layer which protects the sensor array. The scintillator panel is bonded to the sensor panel by making the scintillator layer adhere to the sensor protective layer by using the scintillator protective layer as an adhesive material. A principal component of the scintillator protective layer is the same as a principal component of the sensor protective layer.

Abstract: The amount of traffic on the road is greatly affected by both an inter-vehicle distance and a vehicle speed. When the amount of traffic increases and is more than a threshold value, an ECU 20 and an ACC 30 control the inter-vehicle distance and the vehicle speed such that the amount of traffic is a predetermined value equal to or more than the threshold value. In this way, it is possible to effectively suppress traffic congestion.

Abstract: A method for producing a water-absorbent resin including the step of subjecting a water-soluble ethylenically unsaturated monomer to a reversed phase suspension polymerization in a petroleum hydrocarbon dispersion medium in the presence of a radical polymerization initiator and a dispersion stabilizer, wherein the method is characterized by the use of an ether-ester type nonionic surfactant as the dispersion stabilizer, and a water-absorbent resin obtained by the method, wherein the water-absorbent resin has a water-retention capacity of saline solution of 25 g/g or more, a water-absorption rate of saline solution of 50 seconds or less, and a flow index under moisture absorption of 70% or more. According to the method of the present invention, a water-absorbent resin having high water-retention capacity, excellent water-absorption rate, and further having excellent flowability under moisture absorption can be produced.

Abstract: A device for producing a coated steel sheet includes: a blowing-off unit which sprays a gas onto and remove an excessive coating that accumulates along a side edge of a steel sheet that threads along one direction; and a coating-collection unit which collects the excessive coating removed by the blowing-off unit. The blowing-off unit includes a spray nozzle and a gas supply member. The coating-collection unit includes a duct and a coating container. In a case where the duct is seen in a plan view, an outlet thereof is disposed to fit in and overlap an inside of an opening of the coating container, and in a case where the duct is seen in a side view, a gap is provided between the outlet and the opening of the coating container.

Abstract: A substrate cleaning apparatus capable of efficiently cleaning a substrate, such as a wafer, is provided. The substrate cleaning apparatus includes: a substrate holder for holding and rotating a substrate; a chemical liquid nozzle for supplying a chemical liquid onto the substrate; a two-fluid nozzle for supplying a two-fluid jet onto the substrate; and a moving mechanism for moving the chemical liquid nozzle and the two-fluid nozzle together from a center to a periphery of the substrate. The chemical liquid nozzle and the two-fluid nozzle are adjacent to each other with a predetermined distance therebetween, and the chemical liquid nozzle is located forward of the two-fluid nozzle with respect to a movement direction of the chemical liquid nozzle and the two-fluid nozzle.

Abstract: A power supply control apparatus has a voltage detection unit that detects output voltage of a battery or alternator; a condition acquisition unit that acquires an engine condition; a voltage transformation unit that raises or lowers output voltage; a switching unit that switches power supply to in-vehicle devices to either of the output voltage and a voltage transformed by the voltage transformation unit; and a control unit that outputs instruction to the switching unit based on the output voltage value and the engine condition. The switching unit switches the power supply destination between a first in-vehicle device group to which a voltage higher than V1 is to be supplied and a second different in-vehicle device group and the control unit outputs instruction to lower or raise the voltage to the voltage transformation unit, and outputs instruction to switch between the first and second in-vehicle device groups to the switching unit.

Abstract: When a plurality of images are to be overlapped and synthesized, coincidence degrees between the plurality of images in an area near the boundary of a common area are calculated, and the plurality of images are overlapped and synthesized so that an area near the boundary having a high coincidence degree appears on the overlapped image. Thereby, it is possible to avoid the duplexing of the subject in the common area and unnatural ruptures on the boundary made by the overlapping while reducing the number of processes for the synthesizing.