Abstract: A plurality of magnets are rotatably supported and when a ratio between revolution angle and rotation angle per unit time is set to 1:R, R is set to a value which is not less than 1 and not more than 5, and is not a common divisor of 360, so that the time variation of regions where a magnetic field (line of magnetic force) generated by the each magnet is orthogonal to an electric field is prevented from becoming monotonous. Further, the respective magnets are arranged to make the distances between the center of rotation and the center of revolution of the respective magnets different from each other, so that the regions where the magnetic field (line of magnetic force) generated by the each magnet is orthogonal to the electric field are dispersed in the radial direction of a target.

Abstract: This is a thin film forming apparatus which is equipped with a target constructed of a thin film material, a cathode for generating a particulate thin film material from the target, a supporting member for supporting the substrate on which the particulate thin film material is to be deposited, a heater for heating the substrate, and a guide for introducing the particulate thin film material onto a surface of the substrate where the thin film material is deposited, wherein the supporting member supports the substrate so as to expose the first principal surface and its backside (second principal surface) of the substrate, the target is disposed in a position for producing the particulate thin film material in an extension of the first principal surface of the substrate, and the guide is disposed on the first principal surface and the second principal surface of the substrate.

Abstract: A disk (6) is horizontally rotated a half-turn by a motor (7) in a rotational direction and, then, is rotated a half-turn in an opposite rotational direction. Two servomotors (8, 9) are symmetrically disposed, on an upper surface of the disk (6), with respect to a rotating shaft of the disk (6). Driving shafts (22, 23), driven by the two servomotors (8, 9), downwardly extend through the disk (6), and move hanging members (K, M), respectively, in upward-and-downward directions. Two hanging members (K, M) are provided, at their lower ends, with clampers (32), respectively. The clampers (32) are each provided, at their bottom surfaces, with a suction pad (35), and are provided, at their upper surfaces, with pneumatic cylinders (28, 29). The pressure of the compressed air supplied to the pneumatic cylinder is adjusted by a pressure regulating device (38).

Abstract: A disk (6) is horizontally rotated a half-turn by a motor (7) in a rotational direction and, then, is rotated a half-turn in an opposite rotational direction. Two servomotors (8, 9) are symmetrically disposed, on an upper surface of the disk (6), with respect to a rotating shaft of the disk (6). Driving shafts (22, 23), driven by the two servomotors (8, 9), downwardly extend through the disk (6), and move hanging members (K, M), respectively, in upward-and-downward directions. Two hanging members (K, M) are provided, at their lower ends, with clampers (32), respectively. The clampers (32) are each provided, at their bottom surfaces, with a suction pad (35), and are provided, at their upper surfaces, with pneumatic cylinders (28, 29). The pressure of the compressed air supplied to the pneumatic cylinder is adjusted by a pressure regulating device (38).