Patents by Inventor Masayuki Ashihara

Masayuki Ashihara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Temperature endpointing of chemical mechanical polishing
    Publication number: 20020039874
    Abstract: A method is described for temperature endpointing of a CMP process. A temperature sensor (110) detects temperature changes when the CMP polishing process transitions between different materials.
    Type: Application
    Filed: August 16, 2001
    Publication date: April 4, 2002
    Inventors: Philip E. Hecker, Masayuki Ashihara, Vencent C. Korthuis