Abstract: The present invention has an object to provide a semiconductor device that is equipped with a high breakdown voltage transistor of a high junction breakdown voltage characteristic and a low voltage transistor of a high electric current drive characteristic to thereby ensure the element isolation performance in the both transistor forming regions. The semiconductor device is equipped with a high breakdown voltage transistor (a) and low voltage transistor (b) the widths of whose side walls are different from each other. The side walls of the high breakdown voltage transistor (a) each consist of four layers of first side wall film, second side wall film, third side wall film, and fourth side wall film that are formed in such a way that they are laminated from both side surfaces of a gate electrode in directions that are sidewardly remote away from this gate electrode.

Abstract: The present invention has an object to provide a semiconductor device that is equipped with a high breakdown voltage transistor of a high junction breakdown voltage characteristic and a low voltage transistor of a high electric current drive characteristic to thereby ensure the element isolation performance in the both transistor forming regions. The semiconductor device is equipped with a high breakdown voltage transistor (a) and low voltage transistor (b) the widths of whose side walls are different from each other. The side walls of the high breakdown voltage transistor (a) each consist of four layers of first side wall film, second side wall film, third side wall film, and fourth side wall film that are formed in such a way that they are laminated from both side surfaces of a gate electrode in directions that are sidewardly remote away from this gate electrode.

Abstract: A pattern formation method includes: forming a photoresist layer of a positive type on a substrate; exposing to light and developing the photoresist layer using an inversion mask having an opening at a site where a pattern is desired to be formed finally, thereby forming an opening portion in the photoresist layer to expose the substrate; applying a non-photosensitive organic film on an entire surface of the resulting substrate, so that the non-photosensitive organic film is embedded in the opening portion; etching back an entire surface of the non-photosensitive organic film on the photoresist layer until the photoresist layer is exposed; and exposing to light and developing an entire surface of the photoresist layer to remove the photoresist layer, thereby obtaining the non-photosensitive organic film having the desired pattern.

Abstract: A pattern formation method includes: forming a photoresist layer of a positive type on a substrate; exposing to light and developing the photoresist layer using an inversion mask having an opening at a site where a pattern is desired to be formed finally, thereby forming an opening portion in the photoresist layer to expose the substrate; applying a non-photosensitive organic film on an entire surface of the resulting substrate, so that the non-photosensitive organic film is embedded in the opening portion; etching back an entire surface of the non-photosensitive organic film on the photoresist layer until the photoresist layer is exposed; and exposing to light and developing an entire surface of the photoresist layer to remove the photoresist layer, thereby obtaining the non-photosensitive organic film having the desired pattern.

Abstract: A vortex flow blower used as an air source to be incorporated into general industrial machines. The vortex flow blower is characterized in that the shape of the blade in its impeller is three dimensionally formed such that at least the inner portion of the blade can be adapted to the three dimensional internal flow. According to the present invention, the aerodynamic performance can be significantly improved and the size of a vortex flow blower can be reduced. Furthermore, an impeller having three dimensionally shaped blades is manufactured by independently manufacturing the shroud and the blades and coupling them, so that the impeller of a complicated shape can be readily manufactured. Furthermore, since the blade can be made of a thin and light material, the secondary moment of inertia of the impeller can be reduced.

Abstract: A blower muffling apparatus includes a blower chamber for housing a blower therein, an exhaust chamber positioned adjacent the blower body side of a blower disposed in the blower chamber, communicating in one of upper and lower portions with the blower chamber, and having an exhaust port in the other portion, a muffling passage chamber disposed adjacent the blower chamber in the axial direction of the blower, and having one end communicating with the other portion of the exhaust chamber and the other end communicating with a discharge port of the blower through a flexible exhaust duct, and a duct accommodating chamber for accommodating the flexible exhaust duct therein, each of the chambers being surrounded by a sound-absorbing material. Exhaust gas of the blower is discharged from the flexible exhaust duct through the muffling passage chamber and the exhaust chamber to thereby absorb exhaust noise of the blower.

Abstract: A vane wheel driven by a shaft for transferring a gas, comprises, vortex flow chambers opening in a direction substantially parallel to the shaft to receive the gas, to urge the gas in a substantially circumferential direction of the vane wheel, and to generate and accelerate a vortex flow of the gas, A vane member includes a hub through which the vane member is connected to the shaft, with the vane member including a plurality of vanes each extending integrally from the hub in a substantially radial direction of the vane wheel. Each of the vanes includes a front surface for urging the gas in the substantially circumferential direction of the vane wheel. A vortex flow chamber wall extends integrally from both the hub and each of the vanes, and a cover contacts the vortex flow chamber wall to form the vortex flow chambers together with the vortex flow chamber wall and the vanes.

Abstract: A vane wheel driven by a shaft for transferring a gas, comprises, vortex flow chambers opening in a direction substantially parallel to the shaft to receive the gas, to urge the gas in a substantially circumferential direction of the vane wheel, and to generate and accelerate a vortex flow of the gas. A vane member includes a hub through which the vane member is connected to the shaft, with the vane member including a plurality of vanes each extending integrally from the hub in a substantially radial direction of the vane wheel. Each of the vanes includes a front surface for urging the gas in the substantially circumferential direction of the vane wheel. A vortex flow chamber wall extends integrally from both the hub and each of the vanes, and a cover contacts with the vortex flow chamber wall to form the vortex flow chambers together with the vortex flow chamber wall and the vanes.

Abstract: A vortex blower includes an induction motor and a blower portion driven by the motor. The blower portion includes an impeller and a casing. The impeller is so mounted on a rotary output shaft of the induction motor that the impeller is disposed near the induction motor. The casing is so disposed that the impeller is interposed between the induction motor and the casing. An inlet port and an outlet port are provided on an end of the casing opposite to the induction motor. The blower portion has approximately the same diameter as that of the induction motor.

Abstract: A vortex flow blower used as an air source to be incorporated into general industrial machines. The vortex flow blower is characterized in that the shape of the blade in its impeller is three dimensionally formed such that at least the inner portion of the blade can be adapted to the three dimensional internal flow. According to the present invention, the aerodynamic performance can be significantly improved and the size of a vortex flow blower can be reduced. Furthermore, an impeller having three dimensionally shaped blades is manufactured by independently manufacturing the shroud and the blades and coupling them, so that the impeller of a complicated shape can be readily manufactured. Furthermore, since the blade can be made of a thin and light material, the secondary moment of inertia of the impeller can be reduced.

Abstract: A vane wheel driven by a shaft for transferring a gas, comprises, vortex flow chambers opening in a direction substantially parallel to the shaft to receive the gas, to urge the gas in a substantially circumferential direction of the vane wheel, and to generate and accelerate a vortex flow of the gas. A vane member includes a hub through which the vane member is connected to the shaft, with the vane member including a plurality of vanes each extending integrally from the hub in a substantially radial direction of the vane wheel. Each of the vanes includes a front surface for urging the gas in the substantially circumferential direction of the vane wheel. A vortex flow chamber wall extends integrally from both the hub and each of the vanes, and a cover contacts the vortex flow chamber wall to form the vortex flow chambers together with the vortex flow chamber wall and the vanes.

Abstract: A vortex flow blower used as an air source to be incorporated into general industrial machines. The vortex flow blower is characterized in that the shape of the blade in its impeller is three dimensionally formed such that at least the inner portion of the blade can be adapted to the three dimensional internal flow. According to the present invention, the aerodynamic performance can be significantly improved and the size of a vortex flow blower can be reduced. Furthermore, an impeller having three dimensionally shaped blades is manufactured by independently manufacturing the shroud and the blades and coupling them, so that the impeller of a complicated shape can be readily manufactured. Furthermore, since the blade can be made of a thin and light material, the secondary moment of inertia of the impeller can be reduced.

Abstract: A vortex flow blower including a blower casing having an annular flow passageway extending from an inlet port for receiving fluid to an outlet port for discharging the fluid, the outlet port being disposed adjacent to the inlet port, and an impeller accommodated in the blower casing for producing a vortex flow of the fluid in the annular flow passageway.

Abstract: A vortex blower including a casing, an annular air passageway defined in the casing, an impeller mounted for rotation in the casing, a partition wall, a suction port and a discharge port disposed on both sides of the partition wall and communicated with each other through the annular air passageway, and an extension wall formed by extending at least one wall surface of the partition wall along a surface of rotation of the impeller, the extension wall tapering in going toward its forward end. The blower is further formed with at least one projecting wall continuous with the partition wall and an inner wall surface of the air passageway in the vicinity of the partition wall, for shutting off the noise produced in the vicinity of the partition wall and preventing it from being transmitted to outside to thereby reduce the noise produced by the blower.