Abstract: Since a tool holder is formed of a structure which is elastically deformed by a centrifugal force produced as the tool holder rotates around a rotation center axis, the rotation radius of a tool with a cutting edge directed to the rotation center axis varies from zero to an arbitrary value. The structure of the tool holder includes two beams elastically deformable to the same degree in opposite directions by the centrifugal force, and centrifugal force components acting on the two beams cancel each other so that a rotation balance is maintained even when the rotational speed of the tool holder is changed.

Abstract: A measurement program is created for measurement performed by moving X- and Z-axes so that a central axis of a probe is perpendicular to the surface of a reference sphere, and errors are obtained between original probe position data and probe position data obtained by measurement performed at two different angles ?1 and ?2 of a rotary axis according to the created measurement program. Position coordinates of a tip end of the probe at the two different angles ?1 and ?2 of the rotary axis are corrected so that the errors are zero. Then, the X- and Z-axis coordinates are corrected based on a positive or negative phased shift amount, and measurement errors are obtained by calculation. A real probe tip position is defined by the X- and Z-axis coordinates corrected by a correction amount with which the obtained measurement errors become minimum.

Abstract: A fluid bearing structure with uniform depths of bearing concaves and a method of forming the bearing concaves in the fluid bearing structure. Pipe parts are inserted into through holes formed in the bearing base to form fluid spout holes for spouting fluid between confronting bearing surfaces. Bearing concaves are formed around the fluid spout holes. The bearing base and the pipe parts are made of different materials. A coating layer is formed on the bearing base and the pipe parts by an anodic oxidation process. Thickness of the coating layer on the bearing base is different from thickness of the coating layer on the pipe parts since the base member and the pipe members are made of different materials. The material on which a coating layer grows quickly is selected for the bearing base and the material on which a coating layer grows slowly is selected for the pipe parts.

Abstract: A contact type measurement device performs measurement with displacement of a probe, while a contact member attached to the probe is in contact with an object to be measured. Data on the relationship of a contact force of the probe to the object to be measured with an angle between the central axis of the probe and the direction of gravity, the amount of displacement of the probe, and a fluid pressure for applying a pushing-out or pulling-in force to the probe is stored in advance and, on the basis of this data, the fluid pressure or the amount of displacement of the probe is controlled to automatically and precisely adjust a fine contact force of the probe to the object to be measured.

Abstract: A machine tool is fitted with a position detector for detecting a position of a moving axis of the machine tool and an on-machine measuring device for measurement on the machine tool. An axial position detection signal output from the position detector and a measurement signal output from the on-machine measuring device are received through interfaces by a numerical controller that controls the machine tool. These interfaces are designed so that the numerical controller receives the axial position detection signal and the measurement signal with the same timing.

Abstract: In a simultaneous multi-axis measuring machine tool system including linear drive axes and rotation axes to measure a surface shape of an object to be measured by using an on-board measuring device having a probe mounted, at one end thereof, with a spherical contactor, a numerical controller controls driving of the linear drive axes and the rotation axes so that a central axis of the probe is always oriented in a direction perpendicular to the surface of the object to be measured and that the spherical contactor of the probe comes in contact with and follows a surface of the object to be measured.

Abstract: A reciprocating linear actuator in which a slide and a counter slide are arranged for linear movement within a hollow guide. The actuator has driving force generating means for generating a driving force between the slide and the counter slide and also has bearing structures formed individually between the guide and the slide and between the guide and the counter slide. If an external force acts on the slide, the external force is transmitted from the slide to the guide through the bearing structure between them.

Abstract: Since a tool holder is formed of a structure which is elastically deformed by a centrifugal force produced as the tool holder rotates around a rotation center axis, the rotation radius of a tool with a cutting edge directed to the rotation center axis varies from zero to an arbitrary value. The structure of the tool holder includes two beams elastically deformable to the same degree in opposite directions by the centrifugal force, and centrifugal force components acting on the two beams cancel each other so that a rotation balance is maintained even when the rotational speed of the tool holder is changed.

Abstract: A measurement program is created for measurement performed by moving X- and Z-axes so that a central axis of a probe is perpendicular to the surface of a reference sphere, and errors are obtained between original probe position data and probe position data obtained by measurement performed at two different angles ?1 and ?2 of a rotary axis according to the created measurement program. Position coordinates of a tip end of the probe at the two different angles ?1 and ?2 of the rotary axis are corrected so that the errors are zero. Then, the X- and Z-axis coordinates are corrected based on a positive or negative phased shift amount, and measurement errors are obtained by calculation. A real probe tip position is defined by the X- and Z-axis coordinates corrected by a correction amount with which the obtained measurement errors become minimum.

Abstract: A contact type measurement device performs measurement with displacement of a probe, while a contact member attached to the probe is in contact with an object to be measured. Data on the relationship of a contact force of the probe to the object to be measured with an angle between the central axis of the probe and the direction of gravity, the amount of displacement of the probe, and a fluid pressure for applying a pushing-out or pulling-in force to the probe is stored in advance and, on the basis of this data, the fluid pressure or the amount of displacement of the probe is controlled to automatically and precisely adjust a fine contact force of the probe to the object to be measured.

Abstract: An angle adjusting mechanism or a linear axis of a processing machine is provided with a reciprocation device. A tool and a tool cutting mechanism are mounted on a moving part of the reciprocation device. A workpiece is processed by the tool based on a combination of the drive of the processing machine and the drive of the reciprocation device.

Abstract: When a slide member mounted with a tool reciprocates on a guide member reach one end and the other end positions of the guide member, permanent magnets provided on the guide member and the permanent magnets provided on the slide member repel each other to give the guide member forces for reversing its moving direction. The guide member is provided to be movable with respect to a base and repulsive forces between permanent magnets provided on the base and permanent magnets provided on the guide member are used to retain an axial position of the guide member.

Abstract: There is provided a contact type measuring instrument in which the contact force of a probe is adjusted by a force created by compressed air and an attraction force between a permanent magnet and a magnetic body. This measuring instrument gives a pulling-in force or a pushing-out force to the probe by controlling a fluid pressure in a probe body. Also, between the permanent magnet attached to the tip end of a movable part of a micrometer attached to the probe body and a plate-shaped member attached to the end part on the side opposite to a contact of the probe, an attraction force according to a distance between the permanent magnet and the plate-shaped member is created.

Abstract: In a machine tool having an on-board measuring machine and controlled by a numerical controller, a method of measuring a shape of a workpiece presets a reference point for temperature drift correction on the workpiece, moves a probe to the reference point, resets a coordinate system of the probe to correct a temperature drift of the probe, and carries out shape measurement of the workpiece along a first measuring path. Next, the method moves the probe to the reference point again, resets the coordinate system of the probe to correct a temperature drift of the probe again, and carries out shape measurement of the workpiece along a second measuring path. Thereafter, similar temperature drift correction is carried out for each measuring path until the shape measurement of the workpiece is carried out along the last measuring path.

Abstract: A fluid bearing structure with uniform depths of bearing concaves and a method of forming the bearing concaves in the fluid bearing structure. Pipe parts are inserted into through holes formed in the bearing base to form fluid spout holes for spouting fluid between confronting bearing surfaces. Bearing concaves are formed around the fluid spout holes. The bearing base and the pipe parts are made of different materials. A coating layer is formed on the bearing base and the pipe parts by an anodic oxidation process. Thickness of the coating layer on the bearing base is different from thickness of the coating layer on the pipe parts since the base member and the pipe members are made of different materials. The material on which a coating layer grows quickly is selected for the bearing base and the material on which a coating layer grows slowly is selected for the pipe parts.

Abstract: In a machine tool having an on-board measuring machine and controlled by a numerical controller, a method of measuring a shape of a workpiece presets a reference point for temperature drift correction on the workpiece, moves a probe to the reference point, resets a coordinate system of the probe to correct a temperature drift of the probe, and carries out shape measurement of the workpiece along a first measuring path. Next, the method moves the probe to the reference point again, resets the coordinate system of the probe to correct a temperature drift of the probe again, and carries out shape measurement of the workpiece along a second measuring path. Thereafter, similar temperature drift correction is carried out for each measuring path until the shape measurement of the workpiece is carried out along the last measuring path.

Abstract: A reciprocating linear actuator in which a slide and a counter slide are arranged for linear movement within a hollow guide. The actuator has driving force generating means for generating a driving force between the slide and the counter slide and also has bearing structures formed individually between the guide and the slide and between the guide and the counter slide. If an external force acts on the slide, the external force is transmitted from the slide to the guide through the bearing structure between them.

Abstract: In a simultaneous multi-axis measuring machine tool system including linear drive axes and rotation axes to measure a surface shape of an object to be measured by using an on-board measuring device having a probe mounted, at one end thereof, with a spherical contactor, a numerical controller controls driving of the linear drive axes and the rotation axes so that a central axis of the probe is always oriented in a direction perpendicular to the surface of the object to be measured and that the spherical contactor of the probe comes in contact with and follows a surface of the object to be measured.

Abstract: A machine tool is fitted with a position detector for detecting a position of a moving axis of the machine tool and an on-machine measuring device for measurement on the machine tool. An axial position detection signal output from the position detector and a measurement signal output from the on-machine measuring device are received through interfaces by a numerical controller that controls the machine tool. These interfaces are designed so that the numerical controller receives the axial position detection signal and the measurement signal with the same timing.

Abstract: When a slide member mounted with a tool reciprocates on a guide member reach one end and the other end positions of the guide member, permanent magnets provided on the guide member and the permanent magnets provided on the slide member repel each other to give the guide member forces for reversing its moving direction. The guide member is provided to be movable with respect to a base and repulsive forces between permanent magnets provided on the base and permanent magnets provided on the guide member are used to retain an axial position of the guide member.