Abstract: The present invention provides a heating apparatus that displays a high heating efficiency and a long product life. In addition, present invention provides a heating apparatus that has no limitations with respect to the materials comprising its heat insulating material, which displays an even greater product life and, moreover, can be manufactured easily at low cost.

Abstract: An object of the present invention is to provide a film-forming method, a film-forming system, etc. capable of achieving adequate thickness repeatability and uniformity and sufficiently large film-forming rates in film formation of a thin film on a substrate to be treated and also capable of simplifying a system configuration. A thermal treatment system 1 according to the present invention is a system for forming a thin film of SiO2 on an Si wafer W and is provided with a reactant gas exhaust system 15 for reducing the pressure around the Si wafer W, a reactant gas supply system 14 for supplying hydrogen gas Gh and oxygen gas Go so as to mix them, onto the Si wafer W, and a chamber 2 having a lamp group 9G for heating the Si wafer W, and a wafer support member 3.

Abstract: The decomposition reactive emulsifier of this invention is a compound of formula (I): wherein R1 and R2 are the same or different and each represents an alkyl or alkenyl group of from 1 to 20 carbon atoms or a hydrogen atom and both R1 and R2 are not concurrently a hydrogen; R3 is a hydrogen atom or a methyl group; A is an alkylene or substituted alkylene group of 2 to 4 carbon atoms; n is an integer of from 1 to 100 when X is a hydrogen atom or n is an integer of from 0 to 100 when X is an ionic hydrophilic group, said ionic hydrophilic group being anionic, cationic or amphoteric and when n is 2 or greater (AO)n is a homopolymer or a block copolymer or a random copolymer.

Abstract: According to the present invention, an image transmitter apparatus which has a data structure suited for receiving a request for diagnosis over images and a received image viewing apparatus arranged for displaying desired images a received side are provided.

Abstract: An adjustment system for a video monitor including a microprocessor, a D/A converter, an on-screen display controller circuit and an operator input unit. The microprocessor is configured to output adjustment signals to input circuits of the video monitor via the D/A converter and overlay a message concerning image adjustment on a display screen via the on-screen display controller circuit. The adjustment system corrects the problem of conventional adjustment systems wherein adjustment operation cannot be carried out unless an operator is fully aware of and skilled in the adjustment procedure.

Abstract: A speaker system removably attachable to a video monitor is described which would eliminate the complexity in mounting the speaker system as an add-on unit as well as the ungraceful appearance of the video monitor when the speaker system is removed. The top side of a case incorporating speakers is formed to match the shape of the bottom of the front panel of the video monitor. The speaker system can be mounted on the bottom of the front panel of the video monitor, which is supported on top of a base, as a locking member formed on the top of the case is engaged with a locking hole formed in the bottom of the front panel, or a locking member formed on the bottom of the front panel is engaged with a locking hole formed in the top of the case. Due to lightweight and compact construction, the speaker system can be integrally mounted on the video monitor by using dead space formed between the video monitor and its base and it can be easily removed therefrom.

Abstract: A wafer support device which supports a wafer horizontally from below in the process chamber of the semiconductor production device. A plate-shaped susceptor is placed below the wafer so that the plate surface is parallel to the wafer and has at least three through holes passing through it vertically. Lift pins which can each move axially pass through each of the through holes in the susceptor. Protrusions which support the wafer from its lower surface and which form a space between the wafer and the susceptor are installed on the upper ends of the lift pins. In this way reaction gas can flow between the wafer (2) and the susceptor (21) and form a thin film on the bottom surface of the wafer (2) as well as on the top surface.

Abstract: A MOS transistor semiconductor device has a gate electrode portion with a spacer film, diffused regions diffused with dopants, and element-separating regions. After the formation of the gate on the substrate, a spacer oxide is formed adjacent to the gate. A polysilicon layer doped with the same dopants as the diffused regions is formed between the element-separating regions and the spacer film. The polysilicon layer is overlaps portions of the gate electrode and the element-separating regions that are close to the diffused regions. Thermal diffusion of the dopants from the polysilicon layer to the substrate is performed to further dope the diffused regions. After an insulation layer is formed over the polysilicon layer, connection holes are formed through the insulation layer to connect the polysilicon layer to metal interconnects. In this MOS transistor, the polysilicon layer provides holes that are larger in diameter than holes at the openings of the diffused regions that are part of the substrate surface.

Abstract: To electrically isolate a MOSFET formed on a substrate from an electrical device, a field shield electrode is buried in a substrate between the MOSFET and the electrical device so that the bottom surface of the field shield electrode is at a level deeper than each of depth levels of diffusion layers of the MOSFET and the electric device. To provide such an electrode, a trench is formed in a substrate at a level deeper than the depth levels of the diffusion layers of both the MOSFET and the electric device. After insulating an entire inner surface of the trench, an field shield electrode is buried and exposed surface of the electrode is covered with an insulating film.

Abstract: A method for the production of a desiccant for HFC-32, HFC-152a and blended refrigerants containing HFC-32 and/or HFC-152a comprises immersing formed articles of 3A type zeolite having 20 to 60% in ion equivalent weight of its sodium ions exchanged for potassium ions in an aqueous solution of at least one member selected from the group consisting of sodium silicate and potassium silicate, thereby effecting deposition of SiO.sub.2 on the formed articles, removing the SiO.sub.2 -deposited formed articles from the aqueous solution, dehydrating the wet formed articles and subsequently activating the dehydrated formed articles. Also provided is a desiccant for HFC-32, HFC-152a and blended refrigerants containing HFC-32 and/or HFC-152a produced by this method.

Abstract: A method of etching a polysilicon film specimen by an electronic cyclotron resonance etching technique or a microwave plasma etching technique includes the first process in which a mixed gas containing Cl.sub.2 and HBr is used as a process gas for etching, the Cl.sub.2 occupying 50-70 vol. % of the whole mixed gas; and the second process in which a mixed gas containing HBr and He is used, with HBr being in a proportion of 20-50 vol. % of the mixed gas, and a low bias voltage from -100 to -30 volts is applied to a specimen carrier. Further, in the first and second processes, a mixed gas containing HBr and He is used, with HBr being in a proportion of 20-50 vol. %, and a relatively high bias voltage from -250 to -100 volts is applied to the specimen carrier in the first process, while a low bias voltage from -100 to -30 volts is applied to the same in the second process. According to the present invention, a polysilicon film can be etched without causing undercut and with high dimensional accuracy.

Abstract: Surface-treated sodium bicarbonate particles, the surfaces of which are coated with sodium carbonate or its double salt, are disclosed. Heat treatment or irradiation with micro waves o infrared light converts the surfaces of sodium bicarbonate particles into sodium carbonate. The surface-treated sodium bicarbonate particles exhibit an increased capacity to bind with other sodium bicarbonate particles as well as with other components when they are molded. They can be used as an excellent binder for molding various preparations. The products produced have a prolonged storage stability.

Abstract: A parking gear mounting structure for an automatic transmission includes an input shaft which is supported by a transmission case in such a manner as to be prevented from moving radially with respect to an axis of the input shaft, an output shaft which is arranged coaxially with the input shaft and is also supported by the transmission case in such a manner as to be prevented from moving radially with respect to an axis of the output shaft, and a planetary gearset provided between the input shaft and the output shaft. The planetary gearset has a pinion carrier which is provided with a parking gear in a fixed relationship thereto. The parking gear is engageable with a parking gear locking member for locking the parking gear when the transmission is in parking. The pinion carrier is mounted onto the output shaft to rotate as a unit with the output shaft. A connecting member is provided for transmitting driving power from the input shaft to the planetary gearset.

Abstract: To improve ignition timing precision without being subjected to a harmful influence of gear backlash produced when the distributor unit is directly driven by a camshaft and further to mount the distributor unit on the front cover at any desired inclination angle for reduction of total engine height, the distributor driving apparatus for an DOHC engine, in particular comprises two camshaft sprockets fixed to two camshafts; an idler sprocket rotatably supported between the two camshafts and the crankshaft; a first chain reeved around the crankshaft and the idler sprocket; a second chain reeved around the idler sprocket and the two camshaft sprockets; and a distributor driving gear fixed to the idler sprocket. Therefore, when the crankshaft is rotated, the idler sprocket is driven by the crankshaft via the first chain and therefore the distributor unit is directly driven by the distributor driving gear. On the other hand, the camshaft sprockets are driven by the idler sprocket via the second chain.

Abstract: In an engine having a camshaft mounted on a cylinder head via plural camshaft supporting portions; a camshaft sprocket coaxially coupled to the camshaft; an idler sprocket rotatably supported between the camshaft and the crankshaft on the cylinder head; a first chain reeved around the crankshaft and the idler sprocket; and a second chain reeved around the idler sprocket and the camshaft sprocket, an oil jet hole is formed in the frontmost camshaft supporting portion in communication with a main oil passage via an annular oil groove formed in the camshaft and an inclined oil groove formed in the cylinder head, so that lubricant can be sufficiently jetted from the oil jet hole to the second chain located near the frontmost camshaft supporting member, without use of an additional oil jet pipe member.

Abstract: To allow engine lubricant to quickly and smoothly flow downward along the inner wall surfaces of the chain casing formed in front of an engine having at least one camshaft, an idler sprocket, and first and second chains, the chain casing is composed of a head side chain casing fixed to a front end of the cylinder head, a rocker cover fixed to top ends of the cylinder head and the head side chain casing, and a block side chain casing fixed to a front end of the cylinder block in such a way that lubricant can flow downward on the basis of gravity along the inner wall surfaces of the chain casing.

Abstract: To increase the rigidity of camshaft bearing portions of the cylinder head on the camshaft driving side of an DOHC engine, an each member for symmetrically supporting two camshafts is formed integral with the cylinder head in such a way that the inner arcuate surface thereof extends to both inner side walls of the cylinder head.

Abstract: A washing apparatus, particularly for use on airplanes, comprising a carriage, a support, a mechanism connecting the carriage with the support for moving the support up and down on the carriage, a swing arm extending generally horizontally, a frame pivotably mounted on the swing arm and extending upwardly from the swing arm, a brush rotatably mounted on the upper end of the frame, and a mechanism connecting the swing arm to the support for swinging movement of the swing arm on the support. The apparatus may further include a cover at least partially surrounding the brush.

Abstract: The foam of the present invention, which has a multi-cellular structure including many wrinkles having one end in the boundary portion where at least three cells are adjacent to one another and extending toward the central portion of the cell wall, is a rigid thermoplastic resin foam having an ultra-low density, a high sound-insulating property, a high heat-insulating property and a high flexibility, and it is suitable for adaption for building construction. The process of the present invention is to provide the aforesaid foam of the present invention by subjecting the foam of a rigid thermoplastic resin to expansion, contraction and aging.

Abstract: The foam of the present invention, which has a multi-cellular structure including many wrinkles having one end in the boundary portion where at least three cells are adjacent to one another and extending toward the central portion of the cell wall, is a rigid thermoplastic resin foam having an ultra-low density, a high sound-insulating property, a high heat-insulating property and a high flexibility, and it is suitable for adaption for building construction. The process of the present invention is to provide the aforesaid foam of the present invention by subjecting the foam of a rigid thermoplastic resin to expansion, contraction and aging.