Abstract: A movable optical unit configured to be rotatable around an axis by an electromagnet includes a fixed shaft, a bearing through which the fixed shaft is inserted and which is polarized in a direction orthogonal to a long axis of the fixed shaft, a holding frame that is provided to be rotatable around the fixed shaft and holds at least one optical member, and a pair of arm members extending outward from the holding frame in a direction orthogonal to the long axis of the fixed shaft, the pair of arm members being bonded to the bearing in a state of sandwiching the bearing in a direction along the long axis of the fixed shaft.

Abstract: A thermal humidity measuring device includes first and second heating elements, and is capable of obtaining a plurality of measurement values (measured values) by effectively utilizing each of the heating elements, which includes measuring humidity by the first heating element. A thermal humidity measuring device includes a first bridge circuit that includes a first heating element that senses humidity, and a second bridge circuit that includes a second heating element that heats air around the first heating element. In the thermal humidity measuring device, a first output signal is extracted from the first bridge circuit, and the humidity is sensed. A second output signal is extracted from the second bridge circuit, and the second output signal includes information relating to at least any one of pressure, an air flow rate, and air temperature.

Abstract: A mechanical quantity measuring device includes: a sensor chip having a strain detector formed on a surface of a semiconductor substrate and a plurality of electrodes connected to the strain detector; a stem having ascot that protrudes from an adjacent peripheral portion and has an upper surface that is attached to a lower surface of the sensor chip by a bonding material formed from a metallic material or a glass material; a lead-out wiring part including a plurality of wires that are electrically connected to the plurality of electrodes; and a fixing part for fixing the stem, wherein: the stem and the fixing part are integrally molded or fixed through metallic bonding or mechanical bonding.

Abstract: It is an object of the present invention to provide a thermal humidity measuring device that has a configuration including a first heating element and a second heating element and that is capable of obtaining a plurality of measurement values (measured values) including humidity measured by the first heating element, by effectively utilizing each of the heating elements. A thermal humidity measuring device 1 includes a first bridge circuit 2 that includes a first heating element 4 that senses humidity, and a second bridge circuit 3 that includes a second heating element 10 that heats air around the first heating element 4. In the thermal humidity measuring device 1, a first output signal Va5 is extracted from the first bridge circuit 2, and the humidity is sensed. A second output signal Va15 is extracted from the second bridge circuit 3, and the second output signal Va15 includes information relating to at least any one of pressure, an air flow rate, and air temperature.

Abstract: Provided is a humidity measuring apparatus that can measure a humidity of gas with high accuracy even in an environment with pulsation of gas to be measured, in measuring a humidity of gas with a humidity measuring apparatus using a thermal humidity detecting element. The humidity detecting element is disposed in a space offset from an extension line of a pressure introduction passage in a storage chamber, or a space formed on a depth side of a member provided on an extension line of the pressure introduction passage in the storage chamber such that gas introduced from a pressure introduction port into the pressure introduction passage is bent at least once before reaching the humidity detecting element.

Abstract: Provided is a pressure measuring device that can stably bond a strain detection element even to a diaphragm made of metal having a large coefficient of thermal expansion. In order to achieve the above object, the pressure measuring device of the present invention includes: a metal housing including a pressure introduction unit and a diaphragm deformed by a pressure introduced via the pressure introduction unit; and a strain detection element for detecting strain generated in the diaphragm, wherein a base made of a first brittle material is provided on the metal housing, and the strain detection element is bonded to the base via a second brittle material having a melting point lower than a melting point of the base.

Abstract: In a pressure sensor having a configuration in which strain gauges are provided on a diaphragm, a change in sensor characteristic caused by a positional shift of the strain gauges is suppressed, and a change in sensor output in response to a change in temperature is suppressed.

Abstract: A pressure detecting device is mounted in a measurement target and instrument includes a strain inducer to which pressure of a pressure medium is applied and which generates strain in accordance with the pressure and a strain detecting element that is bonded onto a surface opposite to a pressure receiving surface of the strain inducer, in which the strain detecting element includes one or multiple central strain resistant bridges which are arranged at a central portion of the strain detecting element in a bonded surface direction, and one or multiple outer peripheral strain resistant bridges which are arranged at an outer periphery, and in which, for example, deformation of the strain detecting element caused by an external force when being screw-fixed to the measurement target instrument is obtained through the multiple strain resistant bridges. An error of detection pressure caused by the deformation in a pressure value detected through the central strain resistant bridge is corrected.

Abstract: A mechanical quantity measuring device includes: a sensor chip having a strain detector formed on a surface of a semiconductor substrate and a plurality of electrodes connected to the strain detector; a stem having ascot that protrudes from an adjacent peripheral portion and has an upper surface that is attached to a lower surface of the sensor chip by a bonding material formed from a metallic material or a glass material; a lead-out wiring part including a plurality of wires that are electrically connected to the plurality of electrodes; and a fixing part for fixing the stem, wherein: the stem and the fixing part are integrally molded or fixed through metallic bonding or mechanical bonding.

Abstract: Provided is a pressure measuring device that can stably bond a strain detection element even to a diaphragm made of metal having a large coefficient of thermal expansion. In order to achieve the above object, the pressure measuring device of the present invention includes: a metal housing including a pressure introduction unit and a diaphragm deformed by a pressure introduced via the pressure introduction unit; and a strain detection element for detecting strain generated in the diaphragm, wherein a base made of a first brittle material is provided on the metal housing, and the strain detection element is bonded to the base via a second brittle material having a melting point lower than a melting point of the base.

Abstract: In a pressure sensor having a configuration in which strain gauges are provided on a diaphragm, a change in sensor characteristic caused by a positional shift of the strain gauges is suppressed, and a change in sensor output in response to a change in temperature is suppressed.

Abstract: A pressure detecting device is mounted in a measurement target and instrument includes a strain inducer to which pressure of a pressure medium is applied and which generates strain in accordance with the pressure and a strain detecting element that is bonded onto a surface opposite to a pressure receiving surface of the strain inducer, in which the strain detecting element includes one or multiple central strain resistant bridges which are arranged at a central portion of the strain detecting element in a bonded surface direction, and one or multiple outer peripheral strain resistant bridges which are arranged at an outer periphery, and in which, for example, deformation of the strain detecting element caused by an external force when being screw-fixed to the measurement target instrument is obtained through the multiple strain resistant bridges. An error of detection pressure caused by the deformation in a pressure value detected through the central strain resistant bridge is corrected.

Abstract: Provided is a thermal fluid flow rate measurement device that inhibits the thermal fluid flow rate measurement device and peripheral parts from thermally affecting an intake air temperature detection element and measures an intake air temperature with high accuracy. The thermal fluid flow rate measurement device includes an auxiliary passage 8 that is inserted into a main passage 2 to acquire a part of an air flow 7 in the main passage, a base member 5 that forms a part of the auxiliary passage, a flow rate detection element 11 that is supported by the base member and disposed in the auxiliary passage to detect the flow rate of a fluid, and a circuit section 10 that is electrically connected to the flow rate detection element and housed in a circuit chamber 21 formed by a mold member 4 which is a part of the auxiliary passage.

Abstract: A plate-shaped board is arranged so that fluid passages are respectively formed at a sensor-element mounting surface side of the plate-shaped board and at a backside surface side thereof being opposed to the sensor-element mounting surface side, a curved passage portion is provided which is located upstream of the plate-shaped board and changes its direction so as to form a curved line, and the curved passage portion has an outer-side wall surface including a sloping portion that slopes so that, of two edge portions of the outer-side wall surface in a direction perpendicular to board surfaces of the plate-shaped board, the edge portion located on a sidewall surface, facing the sensor-element mounting surface, of the curved passage portion is positioned closer to an inner wall surface of the curved passage portion than the edge portion located on a sidewall surface opposed to the first sidewall surface, along the sidewall surfaces.

Abstract: A plate-shaped board is arranged so that fluid passages are respectively formed at a sensor-element mounting surface side of the plate-shaped board and at a backside surface side thereof being opposed to the sensor-element mounting surface side, a curved passage portion is provided which is located upstream of the plate-shaped board and changes its direction so as to form a curved line, and the curved passage portion has an outer-side wall surface including a sloping portion that slopes so that, of two edge portions of the outer-side wall surface in a direction perpendicular to board surfaces of the plate-shaped board, the edge portion located on a sidewall surface, facing the sensor-element mounting surface, of the curved passage portion is positioned closer to an inner wall surface of the curved passage portion than the edge portion located on a sidewall surface opposed to the first sidewall surface, along the sidewall surfaces.

Abstract: A first sub passage portion and a second sub passage portion are configured so as to form layers on both sides of a separation wall, respectively. A linear passage portion of a third sub passage portion is formed so that a cross section thereof extends within a range across both sides of the separation wall in a direction perpendicular to a wall surface of the separation wall. The cross section is taken along a direction perpendicular to a flow direction of a fluid flowing through the linear passage portion. The separation wall separates the layer of the first sub passage portion and the layer of the second sub passage portion from each other. A first communication passage portion which allows the first sub passage portion to communicate with the third sub passage portion curves to make a directional change and connects a passage wall surface of the first sub passage portion to a side wall of the third sub passage portion by an inclined surface. The passage wall surface is defined by the separation wall.

Abstract: A first sub passage portion and a second sub passage portion are configured so as to form layers on both sides of a separation wall, respectively. A linear passage portion of a third sub passage portion is formed so that a cross section thereof extends within a range across both sides of the separation wall in a direction perpendicular to a wall surface of the separation wall. The cross section is taken along a direction perpendicular to a flow direction of a fluid flowing through the linear passage portion. The separation wall separates the layer of the first sub passage portion and the layer of the second sub passage portion from each other. A first communication passage portion which allows the first sub passage portion to communicate with the third sub passage portion curves to make a directional change and connects a passage wall surface of the first sub passage portion to a side wall of the third sub passage portion by an inclined surface. The passage wall surface is defined by the separation wall.