Abstract: A piezoelectric sensor is fixed to a detection object and detects distortion of the detection object includes first and second principal surfaces, and extends in the lengthwise direction. The piezoelectric sensor includes a piezoelectric body whose polarization axis extends in a direction parallel or substantially parallel to the lengthwise direction, and first and second detecting electrodes that are provided on a surface of the piezoelectric body and that extend in a direction parallel or substantially parallel to the lengthwise direction. Distortion of the detection object is detected based on electric output corresponding to shear stress of the piezoelectric body.

Abstract: A piezoelectric deflection sensor includes a first package substrate bonded onto a first principal surface of a first piezoelectric plate via a first bonding material layer, and a second package substrate bonded onto a second principal surface of the first piezoelectric plate via a second bonding material layer. A second electrode is provided on a principal surface of the first piezoelectric plate, and first and second segmented electrodes are provided on the other. A polarization axis direction of the first piezoelectric plate is parallel or substantially parallel to the first and second principal surfaces and is a direction along any side of the first piezoelectric plate. A groove extending in a direction intersecting the polarization axis direction in the first package substrate is provided at a position overlapping with at least a portion of a first electrode non-formation region between the first and second segmented electrodes in plan view.

Abstract: An angular acceleration detection device includes a rotating weight, a fixed portion, a support beam, and a detection portion. The rotating weight is rotatable about a Z-axis with respect to the fixed portion by action of an inertial force generated by an angular acceleration about the Z-axis. The fixed portion is disposed at a position spaced from the rotating weight. The support beam is disposed in an X-Y plane between the fixed portion and the rotating weight, the support beam elastically supporting the rotating weight with respect to the fixed portion. The detection portion outputs a detection signal corresponding to stress generated in the support beam. A gravity center position of the rotating weight is aligned with the support beam when viewed in a Z-axis direction.

Abstract: An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along an Y-axis and is connected to the fixed portion and the weight. The beam includes through-holes extending therethrough in a Z-axis direction and protrusions protruding in an X-axis direction. The positions of the piezoresistors in the Y-axis direction overlap those of the through-holes and are displaced from those of the width-direction protrusions.

Abstract: An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along a Y-axis and is connected to the fixed portion and the weight. A width of the beam in an X-axis direction is larger than a width of the connection portion at which the beam is connected to the fixed portion.

Abstract: A piezoelectric sensor is fixed to a detection object and detects distortion of the detection object includes first and second principal surfaces, and extends in the lengthwise direction. The piezoelectric sensor includes a piezoelectric body whose polarization axis extends in a direction parallel or substantially parallel to the lengthwise direction, and first and second detecting electrodes that are provided on a surface of the piezoelectric body and that extend in a direction parallel or substantially parallel to the lengthwise direction. Distortion of the detection object is detected based on electric output corresponding to shear stress of the piezoelectric body.

Abstract: An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along a Y-axis and is connected to the fixed portion and the weight. A width of the beam in an X-axis direction is larger than a width of the connection portion at which the beam is connected to the fixed portion.

Abstract: An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along an Y-axis and is connected to the fixed portion and the weight. The beam includes through-holes extending therethrough in a Z-axis direction and protrusions protruding in an X-axis direction. The positions of the piezoresistors in the Y-axis direction overlap those of the through-holes and are displaced from those of the width-direction protrusions.

Abstract: An angular acceleration sensor includes a flat plate surface, a fixed portion, a weight portion, and a beam portion. The weight portion includes a recessed portion that is recessed in an X-axis negative direction in the flat plate surface. The fixed portion includes a projecting portion that projects in the X-axis negative direction in the flat plate surface to be opposed to the recessed portion. The beam portion extends from the projecting portion in a Y-axis positive direction in the flat plate surface, and is connected to the recessed portion at an end portion in the Y-axis positive direction. Beam-portion proximity regions of the fixed portion and the weight portion in proximity to connecting positions to the beam portion are plane-symmetrical with respect to a stress neutral plane in the flat plate surface.

Abstract: An angular acceleration sensor includes a flat plate surface, a fixed portion, a weight portion, and a beam portion. The weight portion includes a recessed portion that is recessed in an X-axis negative direction in the flat plate surface. The fixed portion includes a projecting portion projecting in the X-axis negative direction in the flat plate surface to be opposed to the recessed portion, and a slit extending inward in an X-axis positive direction from a position adjacent to the projecting portion. The beam portion extends along the Y-axis in the flat plate surface, is connected between the recessed portion and the projecting portion, and supports the weight portion movably relative to the fixed portion.

Abstract: An angular acceleration detection device includes a rotating weight, a fixed portion, a support beam, and a detection portion. The rotating weight is rotatable about a Z-axis with respect to the fixed portion by action of an inertial force generated by an angular acceleration about the Z-axis. The fixed portion is disposed at a position spaced from the rotating weight. The support beam is disposed in an X-Y plane between the fixed portion and the rotating weight, the support beam elastically supporting the rotating weight with respect to the fixed portion. The detection portion outputs a detection signal corresponding to stress generated in the support beam. A gravity center position of the rotating weight is aligned with the support beam when viewed in a Z-axis direction.

Abstract: An acceleration sensor 1 comprises a circuit board 3 on which an acceleration detecting element 2 is carried. A plurality of connecting terminals 4 arranged along the periphery of the circuit board 3 are projected outward after penetrating through a metal base plate 5. The metal base plate 5 is fixed to the connecting terminals 4 spaced apart from the circuit board 3 by a predetermined distance in a state being insulated from the connecting terminals 4. The peripheral edge of the metal base plate 5 is connected to a case 7 covering the entire acceleration sensor 1. Circuit elements constituting a signal processing circuit for processing a detection signal of the acceleration detecting element 2 are arranged on the upper surface and the lower surface of the circuit board 3.