Abstract: Provided is a method of processing a substrate including: forming a film on the substrate by performing a cycle, multiple times, including non-simultaneously performing: (a) supplying a precursor gas and inert gas to the substrate; and (b) supplying a reaction gas to the substrate. In (a), at least one of the precursor and inert gas stored in first tank is supplied to the substrate, and at least one of the precursor and inert gas stored in second tank is supplied to the substrate. A concentration or amount of the precursor gas differs between the first and second tank. Further, in (a), the process chamber is filled with the inert gas before the precursor gas and the inert gas are supplied to the substrate.

Abstract: In a metal negative cell in which the negative electrode mainly comprises a metal such as aluminum, magnesium, zinc, lithium, etc., self discharge readily occurs when the negative electrode and an electrolytic solution are in contact, and the problem of large capacity loss of the cell readily occurs. The metal negative cell is provided with a metal negative cell in which the self-discharge amount is reduced, and the capacity loss of the cell is reduced during use or storage, whereby the metal negative cell varies the cell output according to demand.

Abstract: In a metal negative cell in which the negative electrode mainly comprises a metal such as aluminum, magnesium, zinc, lithium, etc., self discharge readily occurs when the negative electrode and an electrolytic solution are in contact, and the problem of large capacity loss of the cell readily occurs. The metal negative cell is provided with a metal negative cell in which the self-discharge amount is reduced, and the capacity loss of the cell is reduced during use or storage, whereby the metal negative cell varies the cell output according to demand.

Abstract: An autofocus method for bringing an electron beam into focus on a specimen. Characteristics of the brightness at plural kinds of focus values are found for sets of data. The characteristics are accumulated creating a focus function. The focus function is approximated by a quadratic curve. The focus value at the peak point is found from the quadratic curve. Based on the focus value, the focal condition of the beam is set.

Abstract: An autofocus method for bringing an electron beam into focus on a specimen. Characteristics of the brightness at plural kinds of focus values are found for sets of data. The characteristics are accumulated creating a focus function. The focus function is approximated by a quadratic curve. The focus value at the peak point is found from the quadratic curve. Based on the focus value, the focal condition of the beam is set.

Abstract: There is disclosed a part inspecting system that can be easily operated by a human operator. This system has an inspected part information database holding part search information, preliminary inspection information, and review information. The part search information contains information about the positions and sizes of defects present on inspected parts. The review information is obtained from a review apparatus that makes a detailed inspection of the inspected parts. Each inspected part is set on an inspected part-holding member. Apart kind discriminating means is provided to permit the user to enter the kind of the inspected part. A preliminary inspection reading fetches preliminary inspection information about the inspected part specified by the part kind discriminating from the inspected part information database. The user selects a desired one from defects contained in the fetched preliminary inspection information. The selected defect is reviewed, or undergone a detailed inspection.