Abstract: A gating camera divides a field of view in a depth direction into multiple slices, and generates multiple slice images that correspond to the multiple slices. An illumination apparatus emits illumination light. A camera controller controls a light emission timing of the illumination apparatus and an exposure timing of an image sensor so as to generate slice images from a near slice to a farther slice. An arithmetic processing device judges whether a road surface appears for each of the slice images generated in sequence. Processing for a row judged to include a road surface in a given slice is simplified at the time of sensing of a slice farther than the given slice.

Abstract: A substrate detecting apparatus includes: a light sensor unit having a light-emission element and a light-receiving element arranged to face each other across the cassette, and a vertical driving device for moving at least one of the light sensor unit and the cassette relative to each other in a vertical direction a substrate position detecter is also provided for detecting a vertical positional range of each substrate held in the cassette, based on a wave form of an output signal generated by the light sensor unit as the at least one of the light sensor unit and the cassette is vertically moving relative to each other. A substrate conveying apparatus includes a clearance measurement device for measuring a vertical clearance between a pair of substrates held in the cassette, and an arm driving device for inserting the conveyance arm between the pair of substrates while lifting up the conveyance arm along a slant locus when the vertical clearance is less than a predetermined critical value.

Abstract: An interface apparatus is disposed between a processing unit for performing varied treatments on substrates before and after exposure of the substrates, and an exposure unit for performing the exposure. The interface apparatus includes first and second substrate transfer robots, and a substrate storage having a plurality of storage racks for storing a plurality of substrates. The first substrate transfer robot transfer substrates between the processing unit and substrate storage while the second substrate transfer robot transfers substrates between the substrate storage and exposure unit. Each of the robots is operable independently of and parallel to the other robot. The first transfer robot may be omitted, and when it is so omitted, a substrate transport robot in the processing unit performs the functions of the first transfer robot.

Abstract: A plurality of substrate holding members and a substrate pressing member are disposed on a rotation stage at a peripheral portion. The substrate pressing member includes a magnet and is pivotally supported by the rotation stage. A ring-shaped permanent magnet is located below the rotation stage and forms a ring around the rotation axis of the rotation stage. When a substrate mounted on the rotation stage is rotated and processed, the ring-shaped permanent magnet is positioned in the vicinity of the magnet of the substrate pressing member. This creates a magnetic force between the magnets, causing the substrate pressing member to pivot so that the substrate pressing member contacts the edge of the substrate with a predetermined amount of pressure.