Abstract: A semiconductor manufacturing apparatus includes one or more process modules, a scheduler, and a transfer controller. A product wafer of a lot that is transferred from a load port to one of the one or more process modules is replenished such that a total number of wafers that are simultaneously processed in the one or more process modules becomes N. When an advance lot being processed and a post lot to be processed subsequent to the advance lot have a same processing condition, the scheduler creates the transfer plan to replenish with the product wafer of the post lot instead of a dummy wafer such that the transfer controller transfers the product wafer and the dummy wafer to the one or more process modules according to the created transfer plan.

Abstract: A semiconductor manufacturing apparatus includes one or more process modules, a scheduler, and a transfer controller. A product wafer of a lot that is transferred from a load port to one of the one or more process modules is replenished such that a total number of wafers that are simultaneously processed in the one or more process modules becomes N. When an advance lot being processed and a post lot to be processed subsequent to the advance lot have a same processing condition, the scheduler creates the transfer plan to replenish with the product wafer of the post lot instead of a dummy wafer such that the transfer controller transfers the product wafer and the dummy wafer to the one or more process modules according to the created transfer plan.

Abstract: An air flow measuring device includes a body with a main air passage and a sensor attached to the body for detecting a flow rate of air passing through the main air passage. A positioning part that positions the body and the sensor is configured to be exposed to the outside.

Abstract: For arranging an air mass meter at a flow channel, the flow channel has a housing section with a flange surrounding a receiving opening for the air mass meter. The air mass meter has a socket with a contact surface that is facing the flange. Fasteners are provided that attach the socket on the housing section. The socket and the housing section have elements for positioning the air mass meter free of play relative to a flow direction of a fluid flow that is guided in the flow channel.

Abstract: An air flow measuring device can suppress the degradation of measurement accuracy due to variations in attachment position. The air flow measuring device includes a body with a main air passage, a sensor attached to the body for detecting a flow rate of air passing through the main air passage, and a positioning part that positions the body and the sensor. The positioning part is configured to be exposed to the outside.

Abstract: A laminarization lattice of thin plastic and a gate are provided in a body at respective positions so that a distance between the laminarization lattice and the gate is not less than a half of an entire length of the body, and the laminarization lattice and the body are integrally molded. That is, a configuration of the invention enables a hesitation occurring in the lattice of thin plastic to be suppressed, and a resin to be injected at single stroke of a short time to form the lattice of thin plastic.

Abstract: For arranging an air mass meter at a flow channel, the flow channel has a housing section with a flange surrounding a receiving opening for the air mass meter. The air mass meter has a socket with a contact surface that is facing the flange. Fasteners are provided that attach the socket on the housing section. The socket and the housing section have elements for positioning the air mass meter free of play relative to a flow direction of a fluid flow that is guided in the flow channel.

Abstract: A heating resistor type flow measuring device comprising a housing having a support part provided between a frame body and a connector and connected to the mounting part of a fluid passage, a flow rate detection element held on the frame body side of the housing, and an electronic circuit held on the housing and connected electrically to the flow rate detection element and the connector, wherein the electronic circuit is held on the frame body side of the housing and positioned in the fluid passage, a member with the rigidity higher than the material of the main structural member of the housing is formed integrally with the support part, the housing is fixed to the fluid passage through the member with high rigidity. A metal plate is inserted into the support part so as to increase rigidity.

Abstract: An air flow rate measuring device is provided in which a pressure loss across a grid therein due to the load which is generated when a hose band is tightened is reduced and deterioration of its measurement accuracy due to the grid deformation is prevented. The grid is configured to have a grid portion which absorbs deformation at the outer periphery thereof, and another grid portion which does not absorb deformation at the inner periphery thereof. In order to make the grid portions independent of each other, the grid is provided with a frame, and the mesh grid inside of the frame which maintains a rectifying effect, prevents the deterioration of the measurement accuracy, and does not absorb deformation, and the grid outside of the frame absorbs deformation.

Abstract: A thermal type air flow measuring instrument has a molded part formed by integral molding with a metal plate. A slot or opening allowing only a resin to pass through the same is formed in the metal plate in an area subjected to higher stresses. A part of the connector terminals are disposed in the vicinity of an area where the resin has a larger thickness and the temperature difference between the inside and the outside of the resin is locally increased. The injecting direction is set to prevent a weld line and a void from being generated. For the molded part with the metal plate inserted therein, the occurrence of cracks is minimized. Further, an increase of the fatigue crack growth rate is decreased.

Abstract: A laminarization lattice of thin plastic and a gate are provided in a body at respective positions so that a distance between the laminarization lattice and the gate is not less than a half of an entire length of the body, and the laminarization lattice and the body are integrally molded. That is, a configuration of the invention enables a hesitation occurring in the lattice of thin plastic to be suppressed, and a resin to be injected at single stroke of a short time to form the lattice of thin plastic.

Abstract: An air flow rate measuring device is provided in which a pressure loss across a grid therein due to the load which is generated when a hose band is tightened is reduced and deterioration of its measurement accuracy due to the grid deformation is prevented. The grid is configured to have a grid portion which absorbs deformation at the outer periphery thereof, and another grid portion which does not absorb deformation at the inner periphery thereof. In order to make the grid portions independent of each other, the grid is provided with a frame, and the mesh grid inside of the frame which maintains a rectifying effect, prevents the deterioration of the measurement accuracy, and does not absorb deformation, and the grid outside of the frame absorbs deformation.

Abstract: An air temperature detector 12 is disposed close to an auxiliary passage sidewall 15, which has an auxiliary passage wall hole 9 formed near the air temperature detector 12. A heat-sensitive resistor 13 is also disposed close to the auxiliary passage sidewall 15, which has an auxiliary passage wall hole 10 formed near the heat-sensitive resistor 13. Further, a resistor heater 14 is disposed close to an auxiliary passage sidewall 16, which has an auxiliary passage wall hole 11 near the resistor heater 14.

Abstract: A heating resistor type flow measuring device comprising a housing having a support part provided between a frame body and a connector and connected to the mounting part of a fluid passage, a flow rate detection element held on the frame body side of the housing, and an electronic circuit held on the housing and connected electrically to the flow rate detection element and the connector, wherein the electronic circuit is held on the frame body side of the housing and positioned in the fluid passage, a member with the rigidity higher than the material of the main structural member of the housing is formed integrally with the support part, the housing is fixed to the fluid passage through the member with high rigidity. A metal plate is inserted into the support part so as to increase rigidity.

Abstract: The invention is intended to improve reliability of a thermal type air flow measuring instrument employing a molded part formed by integral molding together with a metal plate. A slot or opening allowing only a resin to pass through the same is formed in the metal plate in an area or thereabout subjected to higher stresses. A part of connector terminals, which is not required from the intrinsic object, is disposed in the vicinity of a area where the resin has a larger thickness and the temperature difference between the inside and the outside of the resin is locally increased. An injecting direction is set so as to prevent a weld line and a void from being generated in a combined way. In the molded part with the metal plate inserted therein, the occurrence of cracks and an increase of the fatigue crack growth rate can be suppressed and reliability can be improved.

Abstract: A thermal type air flow measuring instrument has a molded part formed by integral molding with a metal plate. A slot or opening allowing only a resin to pass through the same is formed in the metal plate in an area subjected to higher stresses. A part of the connector terminals, are disposed in the vicinity of an area where the resin has a larger thickness and the temperature difference between the inside and the outside of the resin is locally increased. The injecting direction is set to prevent a weld line and a void from being generated. For the molded part with the metal plate inserted therein, the occurrence of cracks is minimized. Further increase of the fatigue crack growth rate is decreased.

Abstract: A resistance heater 134 for detecting an air flow rate is supported by support members 134A, 134B. A housing 110 contains an electronic circuit 140 connected to the resistance heater 134. The housing 110 is formed by integral molding with a terminal 142 for connecting the electronic circuit 140 to an external device. The terminal 142 is formed integrally with the housing 110. The housing 110 has a groove 112 through which the terminal 142 is exposed in part.

Abstract: Resin members, on the surfaces of which metal films are formed, are used for; an auxiliary air passage provided in a main air passage, in which a sensor element of a physical quantity sensor such as an air flow sensor, an intake-air temperature sensor, etc., is situated; a housing; and so forth; in order to decrease both the thermal conductivity and the emissivity of those components to respective small values, whereby the temperature increase of the sensor due to both the heat conduction and the heat radiation can be suppressed.

Abstract: A heating resistor type flow measuring device comprising a housing having a support part provided between a frame body and a connector and connected to the mounting part of a fluid passage, a flow rate detection element held on the frame body side of the housing, and an electronic circuit held on the housing and connected electrically to the flow rate detection element and the connector, wherein the electronic circuit is held on the frame body side of the housing and positioned in the fluid passage, a member with the rigidity higher than the material of the main structural member of the housing is formed integrally with the support part, the housing is fixed to the fluid passage through the member with high rigidity. A metal plate is inserted into the support part so as to increase rigidity.

Abstract: Resin members, on the surfac s of which metal films are formed, are used for; an auxiliary air passage provided in a main air passage, in which a sensor element of a physical quantity sensor such as an air flow sensor, an intake-air temperature sensor, etc., is situated; a housing; and so forth; in order to decrease both the thermal conductivity and the emissivity of those components to respective small values, whereby the temperature increase of the sensor due to both the heat conduction and the heat radiation can be suppressed.