Patents by Inventor Masayuki Maruo

Masayuki Maruo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam apparatus
    Patent number: 8513627
    Abstract: An assist gas having a very small amount and a uniform concentration is fed by a charged particle beam apparatus, in which a supply amount of gas is intermittently fed by a massflow controller, and gas is passed through a diffusion mechanism connected to the massflow controller, whereby an assist gas having a very small amount and a uniform concentration.
    Type: Grant
    Filed: February 11, 2009
    Date of Patent: August 20, 2013
    Assignee: SII NanoTechnology Inc.
    Inventor: Masayuki Maruo
  • Charged particle beam apparatus
    Publication number: 20090212239
    Abstract: An assist gas having a very small amount and a uniform concentration is fed by a charged particle beam apparatus, in which a supply amount of gas is intermittently fed by a massflow controller, and gas is passed through a diffusion mechanism connected to the massflow controller, whereby an assist gas having a very small amount and a uniform concentration.
    Type: Application
    Filed: February 11, 2009
    Publication date: August 27, 2009
    Inventor: Masayuki Maruo
  • Scanning type charged particle beam microscope
    Patent number: 6683307
    Abstract: A scanning type charged particle beam microscope has a scanning signal generator for generating a scanning signal, a scanning device for scanning a surface of a sample to generate a scanned image of the surface of the sample in accordance with the scanning signal, and correcting device for correcting a shift of the scanned image. An image storing apparatus stores the scanned image after the shift of the scanned image has been corrected.
    Type: Grant
    Filed: July 20, 2001
    Date of Patent: January 27, 2004
    Assignee: Seiko Instruments Inc.
    Inventor: Masayuki Maruo
  • Scanning type charged particle beam microscope
    Publication number: 20020017606
    Abstract: To correct delay time of an electronic circuit of a scanning type charged particle beam microscope, in a scanning type charged particle beam microscope using electron beam, when a scanned image is sampled to a storing apparatus in synchronism with a scanning signal, the scanned image is sampled after correcting delay of an electronic circuit by a shift register having a variable stage number.
    Type: Application
    Filed: July 20, 2001
    Publication date: February 14, 2002
    Inventor: Masayuki Maruo