Abstract: A surface analysis instrument such as an electron probe microanalyzer. The instrument makes surface analyses of different regions on a sample and displays images of the regions according to the obtained information at different positions on the viewing screen of a display unit. The instrument creates a mixed histogram of the regions from the information about the regions. A level assortment is carried out according to the mixed histogram. Information about the level assortment is stored in a memory. Colors are assigned to images of the different regions according to the information about the level assortment. The images are displayed at different positions on the viewing screen.

Abstract: An electron probe microanalyzer equipped with a wavelength-dispersive x-ray spectrometer and also with an energy-dispersive x-ray spectrometer. X-rays emanating from the same sample region are detected by these two spectrometers, and spectra are created from the detected x-rays. Cursors which can be moved at will are superimposed on the spectra. One of the cursors is moved in relation to the other. That is, when one cursor is moved into the position of a desired wavelength or energy, the other is moved into the position of the corresponding energy or wavelength. The use of the cursors enables one to precisely and easily find the existence of a certain element in the sample region from the spectra obtained by the two x-ray spectrometers.