Abstract: A temporary storage system has a large capacity and loads and unloads articles promptly. The temporary storage system includes a grid-shaped travelling rail and buffers over processing equipment except for an area over a load port, and local vehicles travel along the rail. The carriage of the local vehicles is provided with at least a longitudinal travelling unit, at least a lateral travelling unit, and at least an advancement and retraction mechanism selectively advancing one of the longitudinal travelling unit and the lateral travelling unit to a position supported by the travelling rail, and travels along the travelling rail longitudinally and laterally, and the transfer unit of the local vehicles is provided with a hoist and an arm moving the hoist horizontally. The local vehicles stop at a position corresponding to the load port, advances the arm towards the load port, and transfers an article between the load port.

Abstract: In a transport system, a local track is disposed so as to be below an overhead travelling vehicle track in parallel or substantially in parallel therewith, and furthermore above a loading port of a processing device from upstream of the loading port to downstream of the loading port. A local vehicle including a hoist travels along the local track. Below the local track, a first buffer is disposed upstream of the loading port of the processing device, and a second buffer is disposed downstream of the loading port of the processing device, and the overhead travelling vehicle and the local vehicle can both perform delivery and receipt of the article with the first buffer and the second buffer.

Abstract: A temporary storage system has a large capacity and loads and unloads articles promptly. The temporary storage system includes a grid-shaped travelling rail and buffers over processing equipment except for an area over a load port, and local vehicles travel along the rail. The carriage of the local vehicles is provided with at least a longitudinal travelling unit, at least a lateral travelling unit, and at least an advancement and retraction mechanism selectively advancing one of the longitudinal travelling unit and the lateral travelling unit to a position supported by the travelling rail, and travels along the travelling rail longitudinally and laterally, and the transfer unit of the local vehicles is provided with a hoist and an arm moving the hoist horizontally. The local vehicles stop at a position corresponding to the load port, advances the arm towards the load port, and transfers an article between the load port.

Abstract: In a transport system, overhead travelling vehicles each including a hoist travel along an overhead travelling vehicle travelling route. A local vehicle travelling route is disposed under the overhead travelling vehicle travelling route and over load ports at a position higher than the load ports. Local vehicles each including hoist travel along the local vehicle travelling route. Buffers are disposed along the local vehicle travelling route. The local vehicle travelling route includes a plurality of local vehicle travelling routes that are provided in parallel, and the local vehicles are configured to diverge and merge from one local vehicle travelling route to another local vehicle travelling route. The local vehicles transport articles between a load port and a buffer under control of a controller.

Abstract: A storage unit includes carousels each including a plurality of levels and including a plurality of spaces for storing containers on each level, the carousels rotating around a vertical shaft; a loading port for loading and unloading the containers; transport units for transporting the containers between the loading port and the storage spaces; and pipes for feeding clean gas such that feeding is turned on and off for each storage space, the pipes being configured to be connected to an intake port provided for each container.

Abstract: In a transport system, a local track is disposed so as to be below an overhead travelling vehicle track in parallel or substantially in parallel therewith, and furthermore above a loading port of a processing device from upstream of the loading port to downstream of the loading port. A local vehicle including a hoist travels along the local track. Below the local track, a first buffer is disposed upstream of the loading port of the processing device, and a second buffer is disposed downstream of the loading port of the processing device, and the overhead travelling vehicle and the local vehicle can both perform delivery and receipt of the article with the first buffer and the second buffer.

Abstract: In a transport system, a local track is disposed so as to be below an overhead travelling vehicle track in parallel or substantially in parallel therewith, and furthermore above a loading port of a processing device from upstream of the loading port to downstream of the loading port. A local vehicle including a hoist travels along the local track. Below the local track, a first buffer is disposed upstream of the loading port of the processing device, and a second buffer is disposed downstream of the loading port of the processing device, and the overhead travelling vehicle and the local vehicle can both perform delivery and receipt of the article with the first buffer and the second buffer.

Abstract: In a transport system, overhead travelling vehicles each including a hoist travel along an overhead travelling vehicle travelling route. A local vehicle travelling route is disposed under the overhead travelling vehicle travelling route and over load ports at a position higher than the load ports. Local vehicles each including hoist travel along the local vehicle travelling route. Buffers are disposed along the local vehicle travelling route. The local vehicle travelling route includes a plurality of local vehicle travelling routes that are provided in parallel, and the local vehicles are configured to diverge and merge from one local vehicle travelling route to another local vehicle travelling route. The local vehicles transport articles between a load port and a buffer under control of a controller.

Abstract: A system for transporting an article between a plurality of processing devices includes a track extending above load ports of the processing devices, and an overhead travelling vehicle that travels along the track and has a hoist. A local track disposed lower than the track extends at least to a position under the track, and is oriented perpendicular to the track when viewed from above. A local carriage travels along the local track and has a hoist for vertically moving the article. A buffer disposed below the local track delivers and receives the article to and from the local carriage, and extends at least to a position under the track.

Abstract: A storage unit includes carousels each including a plurality of levels and including a plurality of spaces for storing containers on each level, the carousels rotating around a vertical shaft; a loading port for loading and unloading the containers; transport units for transporting the containers between the loading port and the storage spaces; and pipes for feeding clean gas such that feeding is turned on and off for each storage space, the pipes being configured to be connected to an intake port provided for each container.

Abstract: A system for transporting an article between a plurality of processing devices includes a track extending above load ports of the processing devices, and an overhead travelling vehicle that travels along the track and has a hoist. A local track disposed lower than the track at least to a position under the track, and is oriented perpendicular to the track when viewed from above. A local carriage travels along the local track and has a hoist for vertically moving the article. A buffer disposed below the local track delivers and receives the article to and from the local carriage, and extends at least to a position under the track.

Abstract: In a transport system, a local track is disposed so as to be below an overhead travelling vehicle track in parallel or substantially in parallel therewith, and furthermore above a loading port of a processing device from upstream of the loading port to downstream of the loading port. A local vehicle including a hoist travels along the local track. Below the local track, a first buffer is disposed upstream of the loading port of the processing device, and a second buffer is disposed downstream of the loading port of the processing device, and the overhead travelling vehicle and the local vehicle can both perform delivery and receipt of the article with the first buffer and the second buffer.

Abstract: The present invention provides a conveying system that performs efficient conveyance by using trays each accommodating one workpiece, as a basic conveyor, and fully utilizing this advantage of the trays to allow its conveyance form to be changed as required. The conveying system includes a single-pod conveyor 10 for conveying pods 5 one by one, a pod stacker 50 for stacking a plurality of pods 5, a stacked pod conveyor 60 for conveying the stacked pods 5, and a pod destacker 50 for destacking the stacked pods.

Abstract: The present invention provides a conveying system that performs efficient conveyance by using trays each accommodating one workpiece, as basic conveying means, and fully utilizing this advantage of the trays to allow its conveyance form to be changed as required. The conveying system includes a single-pod conveying means 10 for conveying pods 5 one by one, a pod stacking means 50 for stacking a plurality of pods 5, a stacked pod conveying means 60 for conveying the stacked pods 5, and a pod destacking means 50 for destacking the stacked pods.

Abstract: The present invention provides a conveying system that enables the automation of handling of each tray, the handling of multiproduct small lots, and the improvement of conveying efficiency, while maintaining cleanliness. The conveying system has a tray loading and unloading means 20 for loading and unloading a plurality of stacked trays 1 into and from a pod 5 and a pod conveying means 10 for conveying the pod 5.

Abstract: With a rail which is used by both a linear conveyor vehicle and a track guided vehicle, the traveling loops 2,3, the short-cuts 4˜7 and the access routes 8˜11 are provided. The traveling loops 20˜25 are arranged in a rail for a track guided vehicle, and are connected to the traveling loops 2,3 at the diverging/converging point 30. A linear conveyor vehicle system and a track guided vehicle system are integrated to convey articles efficiently.

Abstract: An auxiliary cart 20 is provided to back up a stacker crane in a process, and normally stands by in a passage 12. In operation, a manual cart 22 is loaded on the auxiliary cart 20, and the auxiliary cart 20 is controlled from the manual cart 22 to load and carry articles within the process. Therefore, if the stacker crane in the process fails, it can be backed up by loading the manual cart on the auxiliary cart to move them into the process.

Abstract: With a rail which is used by both a linear conveyor vehicle and a track guided vehicle, the traveling loops 2,3, the short-cuts 4˜7 and the access routes 8˜11 are provided. The traveling loops 20˜25 are arranged in a rail for a track guided vehicle, and are connected to the traveling loops 2,3 at the diverging/converging point 30. A linear conveyor vehicle system and a track guided vehicle system are integrated to convey articles efficiently.

Abstract: A mast 18 of an automatic warehouse 10 is extended to a position under a floor 2 in a clean room in such a manner as to penetrate the floor 2, and a turn table 16 is installed under the floor. In addition, two types of stations, that is, a floor station 26 and an underfloor station 30 are provided, and shelves 14 are provided only in a floor space. The floor station 26 is connected to an unmanned carrier 34, while the underfloor station 30 is connected to a tracked cart 36. This automatic warehouse is easy to install and allows an underfloor space to be used to transfer articles.

Abstract: To supply clean air throughout entire racks even if the height of the racks in an automatic warehouse is increased. A blower motor 18 is provided at the bottom of racks 10 and 11 to suck air in a loading space 12 and supply it to a clean air path 20. In addition, air flows from a ceiling clean fan unit 8 to the racks 10 and 11 via an air intake port 24, and the air flowing from the racks 10 and 11 to the loading space 12 is sucked by means of a blower motor 18.