Patents by Inventor Masoud Aslan

Masoud Aslan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Closed-loop control of a chemical mechanical polisher
    Patent number: 7097534
    Abstract: A method of controlling a chemical mechanical polishing system in which an inner tolerance, an outer tolerance and a specification tolerance limit are received by a control system. The user selects one of the inner tolerance and the outer tolerance, and the user selects a polishing machine procedure for the selected tolerance. A first substrate is polished with the chemical mechanical polishing system, and a thickness of at least one layer in the substrate is measured at an in-line metrology station. If the measured thickness exceeds the selected tolerance, the selected procedure is performed.
    Type: Grant
    Filed: July 10, 2001
    Date of Patent: August 29, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Arkadiy Yampolskiy, Masoud Aslan