Abstract: A pressure sensor module having a sensor housing which includes a housing part in which electrical conductors are partially embedded, the sensor housing being provided with a first cavity, in which a sensor system is situated, and a second cavity which is sealed against the first cavity and in which is provided at least one capacitor, and the first cavity being provided with a receptacle part having a receptacle formed by a peripheral wall, the sensor system being inserted into this receptacle and covered by a protective covering filled into the receptacle. The sensor system is contacted with connecting elements provided on the receptacle part, these connecting elements being directly connected to connecting sections of the electrical conductors; and the at least one capacitor provided in the second cavity is connected to at least one of the electrical conductors via an electrically conductive material.

Abstract: A device for measuring pressure, in particular for measuring high pressure, is provided, having a pressure sensor situated in a sensor housing, the sensor housing having a first sensor housing part provided with a pressure connecting piece and a second sensor housing part provided with an electric terminal. To reduce the manufacturing cost, the second sensor housing part is attached to the first sensor housing part by a connecting part situated between the first sensor housing part and the second sensor housing part, it being possible for the connecting part to be manufactured as a simple punch bent part or thin-walled tubular part, for example.

Abstract: A pressure sensor module having a sensor housing which includes a housing part in which electrical conductors are partially embedded, the sensor housing being provided with a first cavity, in which a sensor system is situated, and a second cavity which is sealed against the first cavity and in which is provided at least one capacitor, and the first cavity being provided with a receptacle part having a receptacle formed by a peripheral wall, the sensor system being inserted into this receptacle and covered by a protective covering filled into the receptacle. The sensor system is contacted with connecting elements provided on the receptacle part, these connecting elements being directly connected to connecting sections of the electrical conductors; and the at least one capacitor provided in the second cavity is connected to at least one of the electrical conductors via an electrically conductive material.

Abstract: A micromechanical device for measuring a pressure variable and a method for manufacturing a micromechanical pressure sensor. The sensor includes, two components; a first component featuring a diaphragm made of a first material, and a second component of a second material. This second component is designed to have a thin first region and a thick second region. The first and second components are permanently joined together via the first diaphragm and at least a portion of the first region. The materials are selected such that the temperature expansion coefficient of the first material is higher than that of the second material. The first and second components are joined in such a manner that a lateral expansion of the first diaphragm caused by temperature changes is transferred to the first region of the second component as a lateral expansion as well.

Abstract: A device for measuring pressure, in particular for measuring high pressure, is provided, having a pressure sensor situated in a sensor housing, the sensor housing having a first sensor housing part provided with a pressure connecting piece and a second sensor housing part provided with an electric terminal. To reduce the manufacturing cost, the second sensor housing part is attached to the first sensor housing part by a connecting part situated between the first sensor housing part and the second sensor housing part, it being possible for the connecting part to be manufactured as a simple punch bent part or thin-walled tubular part, for example.

Abstract: A sensor, in particular a pressure sensor, having a housing 1; a housing interior 12 that contains a sensor element 9; electrical connecting elements 7 that are routed from the outside, through a housing part 2, and into the housing interior 19 and have connecting segments 17, which protrude into the housing interior on an inside 14 of the housing part 2 at respective entry points 15 and are electrically connected to the sensor element; and having a protective covering 21 that covers the connecting segments and the sensor element. To prevent air bubbles from getting into the protective covering, a sealing material 20 is applied onto the connecting segments 17, at least in the region of the entry point 15 of the respective connecting segments 17 into the housing interior 19 and the part 13 of the inside 14 of the housing part 2 encompassing the entry point 15, and the covering 21 is applied onto the sealing material 20 and the connecting segments 17.

Abstract: A sensor, in particular a pressure sensor, having a housing 1; a housing interior 12 that contains a sensor element 9; electrical connecting elements 7 that are routed from the outside, through a housing part 2, and into the housing interior 19 and have connecting segments 17, which protrude into the housing interior on an inside 14 of the housing part 2 at respective entry points 15 and are electrically connected to the sensor element; and having a protective covering 21 that covers the connecting segments and the sensor element. To prevent air bubbles from getting into the protective covering, a sealing material 20 is applied onto the connecting segments 17, at least in the region of the entry point 15 of the respective connecting segments 17 into the housing interior 19 and the part 13 of the inside 14 of the housing part 2 encompassing the entry point 15, and the covering 21 is applied onto the sealing material 20 and the connecting segments 17.

Abstract: A micromechanical device for measuring a pressure variable and a method for manufacturing a micromechanical pressure sensor. The sensor includes, two components; a first component featuring a diaphragm made of a first material, and a second component of a second material. This second component is designed to have a thin first region and a thick second region. The first and second components are permanently joined together via the first diaphragm and at least a portion of the first region. The materials are selected such that the temperature expansion coefficient of the first material is higher than that of the second material. The first and second components are joined in such a manner that a lateral expansion of the first diaphragm caused by temperature changes is transferred to the first region of the second component as a lateral expansion as well.

Abstract: In a pressure sensor module according to the prior art, which is intended for detecting the pressure of a corrosive medium, the conventional sensor cell with a pressure sensor chip is modified in order to protect it from corrosion, which results in a large volume for a pressure-transmitting-fluid. This is disadvantageous for the calibration and for a high degree of measurement precision. In a pressure sensor module (1) according to the invention, a convention sensor cell (5) is used that has an adapter (21) connected to it, which has a very small volume for a pressure-transmitting medium.

Abstract: A pressure sensor module includes a pressure sensor in a sensor housing, the pressure sensor being easily mountable and pre-calibrated.

Abstract: In a pressure sensor module according to the prior art, which is intended for detecting the pressure of a corrosive medium, the conventional sensor cell with a pressure sensor chip is modified in order to protect it from corrosion, which results in a large volume for a pressure-transmitting fluid. This is disadvantageous for the calibration and for a high degree of measurement precision.

Abstract: A related-art pressure sensor module is required to be sealed by a cover in a complicated manner, so as to hold pressure. A pressure sensor module (1) according to the present invention has a pressure sensor (6) in a sensor housing (8), the pressure sensor being easily mountable and pre-calibrated.

Abstract: The current invention relates to a freeze-resistant pressure sensor, which is comprised of a pressure sensor housing (9), which encloses a pressure measurement chamber (10), and a pressure measurement cell (2). In addition, an elastically flexible compensation element (1) is provided, which is disposed in the pressure measurement chamber (10).

Abstract: Resistive and capacitive absolute pressure sensors are disclosed which are made by surface micromachining and thin-film techniques. In the case of a capacitive sensor, the electrodes have a high insulation resistance relative to each other, the diaphragm exhibits only little tensile strain in the finished condition, no sublimation step is necessary to prevent the diaphragm from sticking to the substrate, the diaphragm provides a measurement signal over a wide pressure range even if its rests against the substrate, the measurement signal is virtually temperature-independent, and only few chemical-vapor-deposition and photolithographic steps are necessary.