Patents by Inventor Masuo Anma

Masuo Anma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate-examining apparatus
    Publication number: 20090278045
    Abstract: The invention provides a substrate-examining apparatus which is capable of measuring the detailed shape of a contact hole and the state of a hole bottom. A substrate-examining apparatus includes an electron source (21) for generating an electron beam, a deflector (22) for irradiating a surface of a substrate to be examined with the electron beam from the electron source so as to scan the electron beam, and substrate current detecting means for detecting a current caused to flow from the substrate to a reference potential portion of the apparatus.
    Type: Application
    Filed: August 29, 2008
    Publication date: November 12, 2009
    Inventors: Kusuo Ueno, Masuo Anma
  • Substrate-examining apparatus
    Publication number: 20070085004
    Abstract: The invention provides a substrate-examining apparatus which is capable of measuring the detailed shape of a contact hole and the state of a hole bottom. A substrate-examining apparatus includes an electron source (21) for generating an electron beam, a deflector (22) for irradiating a surface of a substrate to be examined with the electron beam from the electron source so as to scan the electron beam, and substrate current detecting means for detecting a current caused to flow from the substrate to a reference potential portion of the apparatus.
    Type: Application
    Filed: March 28, 2006
    Publication date: April 19, 2007
    Inventors: Kusuo Ueno, Masuo Anma