Patents by Inventor Mathew Evans

Mathew Evans has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250253132
    Abstract: A two-dimensional frequency search grid is defined by a first coordinate axis representing an operating frequency setpoint of an RF signal generator in a first operational state and a second coordinate axis representing an operating frequency setpoint of the RF signal generator in a second operational state. The RF signal generator has a first output power level in the first operational state and a second output power level in the second operational state. The RF signal generator operates in an multi-level RF power pulsing mode by cyclically alternating between the first operational state and the second operational state. An automated search process is performed within the two-dimensional frequency search grid to simultaneously determine an optimum value for the operating frequency setpoint of the RF signal generator in the first operational state and an optimum value for the operating frequency setpoint of the RF signal generator in the second operational state.
    Type: Application
    Filed: April 22, 2025
    Publication date: August 7, 2025
    Inventors: Mathew Evans, Ying Wu, Alexander Paterson
  • Patent number: 12300463
    Abstract: A two-dimensional frequency search grid is defined by a first coordinate axis representing an operating frequency setpoint of an RF signal generator in a first operational state and a second coordinate axis representing an operating frequency setpoint of the RF signal generator in a second operational state. The RF signal generator has a first output power level in the first operational state and a second output power level in the second operational state. The RF signal generator operates in an multi-level RF power pulsing mode by cyclically alternating between the first operational state and the second operational state. An automated search process is performed within the two-dimensional frequency search grid to simultaneously determine an optimum value for the operating frequency setpoint of the RF signal generator in the first operational state and an optimum value for the operating frequency setpoint of the RF signal generator in the second operational state.
    Type: Grant
    Filed: May 9, 2020
    Date of Patent: May 13, 2025
    Assignee: Lam Research Corporation
    Inventors: Mathew Evans, Ying Wu, Alexander Paterson
  • Publication number: 20220189738
    Abstract: A two-dimensional frequency search grid is defined by a first coordinate axis representing an operating frequency setpoint of an RF signal generator in a first operational state and a second coordinate axis representing an operating frequency setpoint of the RF signal generator in a second operational state. The RF signal generator has a first output power level in the first operational state and a second output power level in the second operational state. The RF signal generator operates in an multi-level RF power pulsing mode by cyclically alternating between the first operational state and the second operational state. An automated search process is performed within the two-dimensional frequency search grid to simultaneously determine an optimum value for the operating frequency setpoint of the RF signal generator in the first operational state and an optimum value for the operating frequency setpoint of the RF signal generator in the second operational state.
    Type: Application
    Filed: May 9, 2020
    Publication date: June 16, 2022
    Inventors: Mathew Evans, Ying Wu, Alexander Paterson
  • Publication number: 20030072642
    Abstract: A pallet shuttle for presenting pallets to and unloading pallets from a machining center. The pallet shuttle has tow pallet carriers capable of moving pallet to three positions. The motion of the pallet carriers is achieved by a combination of cylinders one of which couples the carriers to each other, and the other of which moves the carriers relative to the base to which the carriers are mounted. By having the capability to move pallets to three positions, the shuttle allows an operator to quickly and efficiently remove finished parts from and put raw parts into the machining center whenever the need arises. The three-position capability allows an operator to have raw parts ready and waiting.
    Type: Application
    Filed: January 12, 2001
    Publication date: April 17, 2003
    Inventor: Mathew Evans