Patents by Inventor Mathew H. Lent

Mathew H. Lent has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle microscopy using super resolution
    Patent number: 7598492
    Abstract: A method for improving throughput in review of images from a charged particle beam microscopy tool and a charged particle beam microscopy tool are disclosed.
    Type: Grant
    Filed: January 16, 2007
    Date of Patent: October 6, 2009
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Kenneth J. Krzeczowski, Mehran Nasser-Ghodsi, Mathew H. Lent