Patents by Inventor Mathew Ross

Mathew Ross has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of processing films prior to chemical vapor deposition using electron beam processing
    Publication number: 20010000415
    Abstract: A process for the treatment of the surface of dielectric films to remove moisture and other contaminants. Such treatment is done by electron beam exposure in order to prepare the surface for a subsequent chemical vapor deposition of oxide, nitride or oxynitride layers. The films are useful in the manufacture of integrated circuits.
    Type: Application
    Filed: December 4, 2000
    Publication date: April 26, 2001
    Inventor: Mathew Ross