Patents by Inventor Mathias Beck

Mathias Beck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for measuring structures on a transparent substrate
    Patent number: 6323953
    Abstract: A measuring device for measuring structures on a transparent substrate includes an incident-light illuminating device, an imaging device, and a detector device for the imaged structures and a measuring stage for receiving the substrate. The stage is displaceable in an interferometrically measurable fashion perpendicularly to and relative to an optical axis of the imaging device. The measuring stage is designed as an open frame with a receiving edge for the substrate. A transmitted-light illuminating device is provided beneath the measuring stage. The optical axis of the transmitted light illuminating device is aligned with that of the incident-light illuminating device.
    Type: Grant
    Filed: February 2, 1999
    Date of Patent: November 27, 2001
    Assignee: Leica Microsystems Wetzlar GmbH
    Inventors: Carola Blaesing-Bangert, Klaus Rinn, Ulrich Kaczynski, Mathias Beck