Abstract: A combination (231) that creates a fluid film bearing that maintains a stage frame (202) spaced apart from a base frame (204), includes a pad assembly (232) secured to one of the frames (202)(204) and a bearing fluid source (234). The pad assembly (232) includes a porous region (238). The fluid source (234) directs a fluid into the pad assembly (232) so that the fluid is released from the porous region (238) to create the fluid film bearing that maintains the stage frame (202) apart from the base frame (204). The combination (231) is used with a mover (206) having a conductor assembly (218) that is secured to one of the frames (202)(204) and a magnet assembly (216) that is secured to the other one of the frames (202)(204).

Abstract: Vibration of a member supported by another member is damped by detecting the changes in the width of a gap between the members and applying an electrical force between the members in a time-dependent manner. The detection of the changes in the width of the gap may be carried out by an optical displacement sensor or by a capacitive displacement sensor. The electrical force is applied by attaching electrodes on mutually opposite surfaces of the members and connecting them to a voltage source such that their voltages can be varied or to a current source such that mutually parallel and/or antiparallel currents can flow through them. Vibration damping devices structured for using such a vibration damping method can provide shock-absorbing mounts to apparatus of different kinds such as lithography exposure apparatus having an optical frame supported by a base frame, a workpiece being placed on the base frame and the optical frame supporting an optical system for irradiating the workpiece with radiative energy.

Abstract: An apparatus for moving and positioning a device (14) includes a stage assembly (24) and a first mirror component (226). The stage assembly (24) includes a device stage (202) that retains the device (14) and a stage mover assembly (204) that moves the device stage (202). The first mirror component (226) is secured to the device stage (202) and is used for monitoring the position the device stage (202). A first fluid gap (348) exists between the first mirror component (226) and the device stage (202). The first fluid gap (348) provides squeeze film damping of the first mirror component (226) along a first axis. Additionally a second fluid gap (352) can exist between the first mirror component (226) and the device stage (202). The second fluid gap (352) provides squeeze film damping of the first mirror component (226) along a second axis that is orthogonal to the first axis.

Abstract: A swing type structure for a head stack assembly of a disk drive includes a body portion, a coil portion, and at least one actuator arm structure. The actuator arm structure includes at least one elongated column, and a pair of wires in tension. The body portion has a bore defining a longitudinal axis, and the coil portion is cantilevered from the body portion. The elongated column is cantilevered from the body portion in an opposite direction from the coil portion and has a distal end. Each wire is positioned on an opposite side of the elongated column and converges on the distal end such that the elongated column is in compression as a result of the pair of wires.

Abstract: A head stack assembly for a disk drive includes a swing-type structure, a head gimbal assembly, and a coil. The swing-type structure has a bore defining a bore axis. The head gimbal assembly is cantilevered from the swing-type structure to project radially away from the bore axis. The head gimbal assembly includes transducing structure for writing to and reading from the recording surface of a disk. The coil is cantilevered from the swing-type structure to project radially away from the bore axis in a direction opposite from the head gimbal assembly. The coil has a shape to provide a current flow path that includes first and second multi-leg portions that are spaced from each other in a direction parallel to the bore axis.