Patents by Inventor MATSUO IIDA

MATSUO IIDA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SURFACE PLATE FOR POLISHING DEVICE, AND POLISHING DEVICE AND POLISHING METHOD
    Publication number: 20220063052
    Abstract: The present invention relates to improvement of a surface plate to be used in a polishing apparatus, with a polishing pad to be attached on the surface plate. The surface plate of the present invention includes: a surface plate body; and a release layer including a release film or release paper formed on a surface of the surface plate body on which the polishing pad is to be attached. The release layer has a peel force of a surface thereof of 0.08 N/50 mm or more and 5.0 N/50 mm or less. The present invention can be suitably used in a polishing apparatus utilizing a general polishing pad including a pressure-sensitive adhesive. The present invention allows polishing pad fixing work and replacement work to be performed more easily than in a conventional technique.
    Type: Application
    Filed: March 2, 2020
    Publication date: March 3, 2022
    Applicant: MARUISHI SANGYO CO., LTD.
    Inventors: MATSUO IIDA, TOSHIYASU YAJIMA, DAISUKE NINOMIYA, SHIMPEI TATSUNO