Abstract: A vacuum chamber B which stores a length meter is provided separately from a vacuum chamber A in which an object to be measured is installed, an installation base 5 which is integrally mounted to a surface plate 10 that supports the chamber A and/or an object to be measured is installed on a side portion of the vacuum chamber A, and the vacuum chamber B is disposed and installed on the installation base 5 so that a side wall thereof overlaps a side wall A1 of the vacuum chamber A with a side plate member 13 interposed therebetween.

Abstract: A top opening-closing mechanism for opening and closing a top of a container including a container body and the top includes a rolling element rotatably provided at the top and positioned on the outside of the container body in a planar view, a rail, a jack for lifting the rail, and a top resting table disposed adjacent to the container and mounting the top thereon. When the top is opened, the jack lifts the rail, the rail lifts the rolling element from below, and thereby the top is lifted up from the container body. Then, the rolling element rolls on the rail and the top resting table to move the top from above the container body to the top resting table.

Abstract: Provided is a reflecting mirror holding mechanism including: a base that is obtained by integrally forming a fixed portion fixed onto an attachment table and a movable portion including a notched portion having a narrow width; a reflecting mirror holder that holds a reflecting mirror and is fixed to the front end of the base; and a gap width adjustment member that adjusts the gap width of the notched portion of the base, wherein the inclining degree of the reflecting mirror held by the reflecting mirror holder is adjusted when the gap width of the notched portion is decreased or increased by the manipulation of the gap width adjustment member.

Abstract: A top opening-closing mechanism for opening and closing a top of a container including a container body and the top includes a rolling element rotatably provided at the top and positioned on the outside of the container body in a planar view, a rail, a jack for lifting the rail, and a top resting table disposed adjacent to the container and mounting the top thereon. When the top is opened, the jack lifts the rail, the rail lifts the rolling element from below, and thereby the top is lifted up from the container body. Then, the rolling element rolls on the rail and the top resting table to move the top from above the container body to the top resting table.

Abstract: A stage device of an electron beam application apparatus configured to irradiate a sample with an electron beam is configured in a compact and simple manner using a linear motor so that it is possible to minimize an influence of magnetic force of the linear motor to the process of inspection or processing of the sample. The stage device housed in a container is configured so that a first stage and a second stage disposed in upper and lower stages are driven by linear motors, respectively, and motor stationary elements and motor movable elements of both motors are disposed on the outside of an electron beam irradiation region so as not to enter this region during the process.

Abstract: A vacuum pump connecting apparatus has a first vibration absorbing portion and a second vibration absorbing portion which are connected to an evacuation connection portion so as to dispose the first vibration absorbing portion and the second vibration absorbing portion opposite each other via the evacuation connection portion. The first vibration absorbing portion is connected to an intake port of a vacuum pump at a second end of the first vibration absorbing portion opposite to a first end of the first vibration absorbing portion connected to the evacuation connection portion. The first vibration absorbing portion and the second vibration absorbing portion are elastic bellows. A vacuum pump connecting apparatus has a rigid coupling member is connected to a second end of the second vibration absorbing portion opposite to a first end of the second vibration absorbing portion connected to the evacuation connection portion.

Abstract: A vacuum chamber B which stores a length meter is provided separately from a vacuum chamber A in which an object to be measured is installed, an installation base 5 which is integrally mounted to a surface plate 10 that supports the chamber A and/or an object to be measured is installed on a side portion of the vacuum chamber A, and the vacuum chamber B is disposed and installed on the installation base 5 so that a side wall thereof overlaps a side wall A1 of the vacuum chamber A with a side plate member 13 interposed therebetween

Abstract: An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1), and a tablet lens (17-1) as an objective lens. The beam separator (12-1) is configured such that a distance by which a secondary electron beam passes through the beam separator is approximately three times longer than a distance by which a primary electron beam passes through the beam separator. Therefore, even if a magnetic field in the beam separator is set to deflect the primary electron beam by a small angle equal to or less than approximately 10 degrees, the secondary electron beam can be deflected by approximately 30 degrees, so that the primary and secondary electron beams are sufficiently separated. Also, since the primary electron beam is deflected by a small angle, less aberration occurs in the primary electron beam.

Abstract: To provide a vacuum pump capable of evacuating in pressure ranges from an atmospheric pressure to a high vacuum, capable of rotating at a high speed to be downsized and improved in pumping performance, and capable of producing a completely oil-free vacuum. A vacuum pump for exhausting a gas comprises: a main shaft 5 rotatably supported by a bearing 22; a motor 23 for driving the main shaft 5 for rotation; a first exhaust section 10 having a first rotary vane 13 attached to the main shaft 5, a first fixed vane 14 fixed in a first casing 12, and an intake port 11; and a second exhaust section 30 having a second rotary vane 33 attached to the main shaft 5, a second fixed vane 34 fixed in a second casing 32, and an exhaust port 31. The intake port 11 is located in the vicinity of an end of the main shaft 5, and the first exhaust section 10, the bearing 22 and the second exhaust section 30 are arranged in this order axially along the main shaft 5.

Abstract: An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1), and a tablet lens (17-1) as an objective lens. The beam separator (12-1) is configured such that a distance by which a secondary electron beam passes through the beam separator is approximately three times longer than a distance by which a primary electron beam passes through the beam separator. Therefore, even if a magnetic field in the beam separator is set to deflect the primary electron beam by a small angle equal to or less than approximately 10 degrees, the secondary electron beam can be deflected by approximately 30 degrees, so that the primary and secondary electron beams are sufficiently separated. Also, since the primary electron beam is deflected by a small angle, less aberration occurs in the primary electron beam.

Abstract: A rotary apparatus, in which a rotor can rotate stably when it rotates at a high speed, can rotate at a relatively high speed by the torque of a highly reliable induction motor. The rotary apparatus comprises a rotor shaft and an induction motor. The induction motor includes a motor rotor core fixed to the rotor shaft, conductors disposed in the motor rotor core and a motor end ring for assembling and connecting the conductors, and can rotate the rotor shaft at a high speed by the torque. The rotor shaft is provided with a member that covers the motor end ring.

Abstract: A very safe and reliable turbo-molecular pump has been developed so that if an abnormal condition should develop on the rotor structure, it will not lead to damage to the stator or pump casing to cause a loss of vacuum in a vacuum processing system. The turbo-molecular pump has a pump casing housing a stator and a rotor therein, a vane pumping section and/or a groove pumping section formed by the stator and the rotor, and a constriction releasing structure for releasing the constriction of at least a part of the stator when an abnormal torque is applied to the stator by the rotor.

Abstract: A turbo-molecular pump of high safety and reliability was presented, so that if an abnormal condition should develop on the rotor side, it will not lead to any damage to the stationary portions such as the stator or pump casing to cause loss of vacuum in a vacuum processing system. The turbo-molecular pump includes a rotor; a stator assembly surrounding the rotor; and a casing portion surrounding the stator assembly, wherein at least a partial clearance is formed between the stator assembly and the casing portion, so that, when an abnormal torque is applied from the rotor to the stator assembly, direct impact transmission is prevented from the stator assembly to the casing portion.

Abstract: To provide a vacuum pump capable of evacuating in pressure ranges from an atmospheric pressure to a high vacuum, capable of rotating at a high speed to be downsized and improved in pumping performance, and capable of producing a completely oil-free vacuum. A vacuum pump for exhausting a gas comprises: a main shaft 5 rotatably supported by a bearing 22; a motor 23 for driving the main shaft 5 for rotation; a first exhaust section 10 having a first rotary vane 13 attached to the main shaft 5, a first fixed vane 14 fixed in a first casing 12, and an intake port 11; and a second exhaust section 30 having a second rotary vane 33 attached to the main shaft 5, a second fixed vane 34 fixed in a second casing 32, and an exhaust port 31. The intake port 11 is located in the vicinity of an end of the main shaft 5, and the first exhaust section 10, the bearing 22 and the second exhaust section 30 are arranged in this order axially along the main shaft 5.

Abstract: A vacuum pump is capable of preventing reaction products produced by a process gas from being precipitated in the pump, of holding various pump components in an allowable temperature range, and hence of operating in a wide operation range, and which has increased durability. The vacuum pump has a pump casing having an intake port and an exhaust port, an exhaust assembly disposed in the pump casing and having a rotor and a stator, and a heating unit for heating a stator side component of the exhaust assembly positioned near the exhaust port. The heating unit is disposed in a space inside the pump casing where is evacuated during operation, and held in contact with at least a portion of the stator side component of the exhaust assembly positioned near the exhaust port.

Abstract: A magnetic levitation rotating machine is provided which can stably detect the displacement and rotating speed of a rotator and, at the same time, can reduce the size of the whole apparatus, that is, can render the whole apparatus compact. The magnetic levitation rotating machine for supporting a rotator in a levitated state by magnetic force of an electromagnet or a permanent magnet comprises: a position detection plane provided in the rotator and a concave and/or a convex provided in the plane; a displacement sensor provided on the fixed side, for detecting the displacement of the plane including the concave or the convex; and a detection mechanism for detecting the displacement of the rotator and the rotating speed of the rotator from the output of the displacement sensor.

Abstract: A turbo-molecular pump includes a casing having an intake port, a stator fixedly mounted in the casing, and a rotor supported in the casing for rotation relatively to the stator. The stator and the rotor make up a turbine blade pumping section and a groove pumping section for evacuating gas. A scattering prevention member is provided for preventing fragments of the rotor from being scattered through the intake port.