Patents by Inventor Matt A. Evanko

Matt A. Evanko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Particle monitor for throttled pumping systems
    Patent number: 5534706
    Abstract: A method for accomplishing particle monitoring above the throttle valve of a turbo pump provides a particle sensor which is built into the throttle valve in such a way that it is insensitive to local plasma glows. Furthermore, the particle sensor is placed such that a particle monitoring laser beam of the particle sensor is offset from the centerline of the pipe, so as to maximize exposure to process gas flow which is diverted to the periphery of the pipe by the position of a butterfly valve plate.
    Type: Grant
    Filed: March 7, 1994
    Date of Patent: July 9, 1996
    Assignee: High Yield Technology, Inc.
    Inventors: Peter G. Borden, Derek G. Aqui, Matt A. Evanko