Abstract: A method for TEM sample preparation with backside milling of a sample extracted from a workpiece in an energetic-beam instrument such as a FIB-SEM is disclosed. The method includes rotating a nanomanipulator probe tip holding an extracted sample by an angle calculated according to the geometry of the apparatus; moving the instrument stage to position a TEM grid in a fixed holder so that the plane of the TEM grid is substantially parallel to the required plane for the TEM sample; attaching the extracted sample to the TEM grid; and, tilting the stage by a stage-tilt angle, while maintaining the holder in the fixed orientation with respect to the stage, so that the axis of the ion beam is made substantially parallel to the required plane for the TEM sample; thereby placing the extracted sample into position for allowing backside milling to prepare a thinned cross-sectional sample for TEM viewing.

Abstract: The present disclosure is directed to a method and system for removing rows from directory tables. In accordance with a particular embodiment of the present disclosure, an image copy of at least a portion of a database directory table is created. A plurality of candidate rows to delete from the directory table is identified by comparing each row of the portion of the database directory table against one or more deletion criteria. An updated image copy is established by deleting the plurality of candidate rows from the image copy.