Patents by Inventor Matt Kanetomi

Matt Kanetomi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer chuck with aerodynamic design for turbulence reduction
    Patent number: 10563298
    Abstract: A rotatable wafer chuck includes chuck arms and wafer holders that are aerodynamically shaped to reduce turbulence during rotation. A wafer holder may include a friction support and an independently rotatable vertical alignment member and clamping member that is shaped to reduce drag. The shape reduces turbulence during edge bevel etching to improve the uniformity of the edge exclusion and during high-speed rotation to improve particle performance.
    Type: Grant
    Filed: July 11, 2017
    Date of Patent: February 18, 2020
    Assignee: Novellus Systems, Inc.
    Inventors: Craig P. Stephens, Matt Kanetomi, Joseph Richardson, Chris Veazey, Aaron LaBrie
  • Wafer chuck with aerodynamic design for turbulence reduction
    Patent number: 9732416
    Abstract: A rotatable wafer chuck includes chuck arms and wafer holders that are aerodynamically shaped to reduce turbulence during rotation. A wafer holder may include a friction support and an independently rotatable vertical alignment member and clamping member that is shaped to reduce drag. The shape reduces turbulence during edge bevel etching to improve the uniformity of the edge exclusion and during high-speed rotation to improve particle performance.
    Type: Grant
    Filed: April 18, 2007
    Date of Patent: August 15, 2017
    Assignee: Novellus Systems, Inc.
    Inventors: Craig P. Stephens, Matt Kanetomi, Joseph Richardson, Chris Veazey, Aaron LaBrie