Patents by Inventor Matthew Antoniou

Matthew Antoniou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal control system and method
    Patent number: 8240160
    Abstract: In a thermal control system of the type employing a two phase refrigerant that is first compressed and then is divided into a variable mass flow of refrigerant into a hot pressurized gas form and a differential remainder flow of cooled vapor derived from condensation and then thermal expansion, transitions between different temperature levels are enhanced by incremental variations of the mass flow at different control rates.
    Type: Grant
    Filed: March 25, 2009
    Date of Patent: August 14, 2012
    Assignee: BE Aerospace, Inc.
    Inventors: Kenneth W. Cowans, Matthew Antoniou, Glenn Zubillaga, William W. Cowans
  • THERMAL CONTROL SYSTEM AND METHOD
    Publication number: 20090248212
    Abstract: In a thermal control system of the type employing a two phase refrigerant that is first compressed and then is divided into a variable mass flow of refrigerant into a hot pressurized gas form and a differential remainder flow of cooled vapor derived from condensation and then thermal expansion, transitions between different temperature levels are enhanced by incremental variations of the mass flow at different control rates.
    Type: Application
    Filed: March 25, 2009
    Publication date: October 1, 2009
    Inventors: Kenneth W. Cowans, Matthew Antoniou, Glenn Zubillaga, William W. Cowans
  • Systems and methods for controlling temperatures of process tools
    Patent number: 6783080
    Abstract: A system and method for controlling a critical process variable, such as the temperature of one or more temperature control units for cluster tools in a semiconductor fabrication facility, uses dual interrelated PID) algorithms for interrelated but at times separate control of heating capabilities. The temperature control units operate with high power efficiency, because no heating energy is expended during cooling and non-transition modes. When approaching a temperature threshold, however, the heating algorithm is reinstated just long enough to provide minimum undershoot and enabling precise, low per consuming, steady state control at ±0.1° C., minimizing undershoot and enabling precise steady state control at ±0.1° C.
    Type: Grant
    Filed: May 16, 2003
    Date of Patent: August 31, 2004
    Assignee: Advanced Thermal Sciences Corp.
    Inventors: Matthew Antoniou, Bryan Christofferson
  • Systems and methods for controlling temperatures of process tools
    Publication number: 20040035851
    Abstract: A system and method for controlling a critical process variable, such as the temperature of one or more temperature control units for cluster tools in a semiconductor fabrication facility, uses dual interrelated PR) algorithms for interrelated but at times separate control of heating capabilities. The temperature control units operate with high power efficiency, because no heating energy is expended during cooling and non-transition modes. When approaching a temperature threshold, however, the heating algorithm is reinstated just long enough to provide minimum undershoot and enabling precise, low per consuming, steady state control at ±0.1° C., minimizing undershoot and enabling precise steady state control at ±0.1° C.
    Type: Application
    Filed: May 16, 2003
    Publication date: February 26, 2004
    Inventors: Matthew Antoniou, Bryan Christofferson