Patents by Inventor Matthew August Mattson

Matthew August Mattson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for film modification
    Patent number: 11049731
    Abstract: A method of converting films is disclosed. A method of modifying films is also disclosed. Some methods advantageously convert films from a first elemental composition to a second elemental composition. Some methods advantageously modify film properties without modifying film composition.
    Type: Grant
    Filed: September 27, 2019
    Date of Patent: June 29, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Erica Chen, Chentsau Chris Ying, Bhargav S. Citla, Jethro Tannos, Matthew August Mattson
  • Methods For Film Modification
    Publication number: 20200105541
    Abstract: A method of converting films is disclosed. A method of modifying films is also disclosed. Some methods advantageously convert films from a first elemental composition to a second elemental composition. Some methods advantageously modify film properties without modifying film composition.
    Type: Application
    Filed: September 27, 2019
    Publication date: April 2, 2020
    Inventors: Erica Chen, Chentsau Chris Ying, Bhargav S. Citla, Jethro Tannos, Matthew August Mattson