Patents by Inventor Matthew C. Egloff

Matthew C. Egloff has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces
    Patent number: 7313462
    Abstract: An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.
    Type: Grant
    Filed: June 3, 2004
    Date of Patent: December 25, 2007
    Assignee: Semitool, Inc.
    Inventors: Daniel J. Woodruff, David P. Mattson, James J. Erickson, Matthew C. Egloff
  • Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems
    Patent number: 7198694
    Abstract: An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.
    Type: Grant
    Filed: June 3, 2004
    Date of Patent: April 3, 2007
    Assignee: Semitool, Inc.
    Inventors: Daniel J. Woodruff, Jeffry Alan Davis, Randy A. Harris, David P. Mattson, James J. Erickson, Matthew C. Egloff