Patents by Inventor Matthew C. Tsai

Matthew C. Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cooling pedestal with coating of diamond-like carbon
    Patent number: 10053778
    Abstract: A cooling pedestal for supporting a substrate, comprises a support structure having cooling conduits to flow a fluid therethrough to cool the substrate, and a contact surface comprising a coating of a diamond-like carbon. The coating comprises (i) a coefficient of friction of less than about 0.3, (ii) an average surface roughness of less than about 0.4 micrometers, and (iii) a microhardness of at least about 8 GPa.
    Type: Grant
    Filed: July 21, 2014
    Date of Patent: August 21, 2018
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Vijay D. Parkhe, Kurt J Ahmann, Matthew C Tsai, Steve Sansoni
  • COOLING PEDESTAL WITH COATING OF DIAMOND-LIKE CARBON
    Publication number: 20140326184
    Abstract: A cooling pedestal for supporting a substrate, comprises a support structure having cooling conduits to flow a fluid therethrough to cool the substrate, and a contact surface comprising a coating of a diamond-like carbon. The coating comprises (i) a coefficient of friction of less than about 0.3, (ii) an average surface roughness of less than about 0.4 micrometers, and (iii) a microhardness of at least about 8 GPa.
    Type: Application
    Filed: July 21, 2014
    Publication date: November 6, 2014
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Vijay D. PARKHE, Kurt J. AHMANN, Matthew C. TSAI, Steve SANSONI
  • Heat exchange pedestal with coating of diamond-like material
    Patent number: 8852348
    Abstract: A substrate heat exchange pedestal comprises: (i) a support structure having a contact surface comprising a coating of a diamond-like material, and (ii) a heat exchanger in the support structure, the heat exchanger capable of heating or cooling a substrate.
    Type: Grant
    Filed: October 1, 2010
    Date of Patent: October 7, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Vijay D Parkhe, Kurt J Ahmann, Matthew C Tsai, Steve Sansoni
  • HEAT EXCHANGE PEDESTAL WITH COATING OF DIAMOND-LIKE MATERIAL
    Publication number: 20110017424
    Abstract: A substrate heat exchange pedestal comprises: (i) a support structure having a contact surface comprising a coating of a diamond-like material, and (ii) a heat exchanger in the support structure, the heat exchanger capable of heating or cooling a substrate.
    Type: Application
    Filed: October 1, 2010
    Publication date: January 27, 2011
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Vijay D. PARKHE, Kurt J. AHMANN, Matthew C. TSAI, Steve SANSONI
  • Coating for reducing contamination of substrates during processing
    Patent number: 7824498
    Abstract: A substrate support has a support structure and a coating on the support structure having a carbon-hydrogen network. The coating has a contact surface having a coefficient of friction of less than about 0.3 and a hardness of at least about 8 GPa. The contact surface of the coating is capable of reducing abrasion and contamination of a substrate that contacts the contact surface. In one version, the support structure has a dielectric covering an electrode. A plurality of mesas on the dielectric have a coating with the contact surface thereon.
    Type: Grant
    Filed: February 24, 2004
    Date of Patent: November 2, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Vijay D. Parkhe, Kurt J. Ahmann, Matthew C. Tsai, Steve Sansoni