Patents by Inventor Matthew Carnes

Matthew Carnes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Tungsten processing slurry with catalyst
    Patent number: 10066126
    Abstract: Described are compositions (e.g., slurries) useful in methods for chemical-mechanical processing (e.g. polishing or planarizing) a surface of a substrate that contains tungsten, the slurries containing abrasive particles, metal cation catalyst, phosphorus-containing zwitterionic compound, and optional ingredients such as oxidizer; also described are methods and substrates used or processed on combination with the compositions.
    Type: Grant
    Filed: January 6, 2016
    Date of Patent: September 4, 2018
    Assignee: Cabot Microelectronics Corporation
    Inventors: Kevin P. Dockery, Helin Huang, Matthew Carnes, Glenn Whitener
  • TUNGSTEN PROCESSING SLURRY WITH CATALYST
    Publication number: 20170190936
    Abstract: Described are compositions (e.g., slurries) useful in methods for chemical-mechanical processing (e.g. polishing or planarizing) a surface of a substrate that contains tungsten, the slurries containing abrasive particles, metal cation catalyst, phosphorus-containing zwitterionic compound, and optional ingredients such as oxidizer; also described are methods and substrates used or processed on combination with the compositions.
    Type: Application
    Filed: January 6, 2016
    Publication date: July 6, 2017
    Inventors: Kevin P. Dockery, Helin Huang, Matthew Carnes, Glenn Whitener