Patents by Inventor Matthew David Moon

Matthew David Moon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Nitride etchstop film to protect metal-insulator-metal capacitor dielectric from degradation and method for making same
    Publication number: 20030146492
    Abstract: A multilayer semiconductor device that includes a metal-insulator-metal (MIM) capacitor including a first metal plate, a dielectric layer, and a second metal plate, a nitride etchstop layer formed above the MIM capacitor, a first interlayer dielectric formed on the nitride etchstop layer, and a first via and a second via that extend through at least the first interlayer dielectric to contact the nitride etchstop layer.
    Type: Application
    Filed: November 25, 2002
    Publication date: August 7, 2003
    Applicant: International Business Machines Corporation
    Inventors: John Chester Malinowski, Matthew David Moon, Vidhya Ramachandran, Kimball M. Watson