Patents by Inventor Matthew Derstine

Matthew Derstine has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10976025
    Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.
    Type: Grant
    Filed: February 13, 2018
    Date of Patent: April 13, 2021
    Assignee: KLA Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Rudolf Brunner
  • Publication number: 20210022233
    Abstract: A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.
    Type: Application
    Filed: September 22, 2020
    Publication date: January 21, 2021
    Inventors: Matthew Derstine, Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin
  • Patent number: 10887974
    Abstract: A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.
    Type: Grant
    Filed: June 20, 2016
    Date of Patent: January 5, 2021
    Assignee: KLA Corporation
    Inventors: Matthew Derstine, Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin
  • Publication number: 20200274314
    Abstract: A system for pumping laser sustained plasma is disclosed. The system includes a plurality of pump modules configured to generate respective pulses of pump illumination for the laser sustained plasma, wherein at least one pump module is configured to generate a train of pump pulses that is interlaced in time with another train of pump pulses generated by at least one other pump module of the plurality of pump modules. The system further includes a plurality of non-collinear illumination paths configured to direct the respective pulses of pump illumination from the plurality of pump modules into a collection volume of the laser sustained plasma.
    Type: Application
    Filed: February 14, 2020
    Publication date: August 27, 2020
    Inventors: Ilya Bezel, Matthew Derstine, William Schumaker, Michael Friedmann
  • Patent number: 10714327
    Abstract: A system for pumping laser sustained plasma and enhancing one or more selected wavelengths of output illumination generated by the laser sustained plasma is disclosed. In embodiments, the system includes one or more pump modules configured to generate pump illumination for the laser sustained plasma and one or more enhancing illumination sources configured to generate enhancing illumination at one or more selected wavelengths. The pump illumination may be directed along one or more pump illumination paths that are non-collinear to an output illumination path of the output illumination. The enhancing illumination may be directed along an illumination path that is collinear to the output illumination path of the output illumination so that the enhancing illumination is combined with the output illumination, thereby enhancing the output illumination at the one or more selected wavelengths.
    Type: Grant
    Filed: February 22, 2019
    Date of Patent: July 14, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Derstine
  • Publication number: 20200150445
    Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source and a beam shaper. The illumination source can be configured to output illumination having a first pupil power distribution. In embodiments, the beam shaper is configured to receive the illumination having the first pupil power distribution from the illumination source and is further configured to output pump illumination having a second pupil power distribution that is different from the first pupil power distribution.
    Type: Application
    Filed: November 9, 2018
    Publication date: May 14, 2020
    Inventors: Ilya Bezel, Matthew Derstine, Andrey Stepanov, Nikolay Sherbak
  • Patent number: 10568195
    Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source configured to output illumination having a first spectral frequency and an optical frequency converter. The optical frequency converter can be configured to receive the illumination having the first spectral frequency from the illumination source and configured to output pump illumination having a second spectral frequency that is different from the first spectral frequency.
    Type: Grant
    Filed: August 1, 2018
    Date of Patent: February 18, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine
  • Publication number: 20190373709
    Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source configured to output illumination having a first spectral frequency and an optical frequency converter. The optical frequency converter can be configured to receive the illumination having the first spectral frequency from the illumination source and configured to output pump illumination having a second spectral frequency that is different from the first spectral frequency.
    Type: Application
    Filed: August 1, 2018
    Publication date: December 5, 2019
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine
  • Patent number: 10495287
    Abstract: A broadband illumination source is disclosed. The broadband illumination source may include a pump source configured to generate pump illumination. The broadband illumination also includes an active medium containing nanocrystals. The broadband illumination source includes pump illumination optics configured to direct pump illumination into the active medium. The active medium is configured to emit broadband illumination by down-converting a portion of the pump illumination via photoluminescence.
    Type: Grant
    Filed: January 3, 2018
    Date of Patent: December 3, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Lauren Wilson, Joshua Wittenberg, Matthew Derstine
  • Publication number: 20190287785
    Abstract: A system for pumping laser sustained plasma and enhancing one or more selected wavelengths of output illumination generated by the laser sustained plasma is disclosed. In embodiments, the system includes one or more pump modules configured to generate pump illumination for the laser sustained plasma and one or more enhancing illumination sources configured to generate enhancing illumination at one or more selected wavelengths. The pump illumination may be directed along one or more pump illumination paths that are non-collinear to an output illumination path of the output illumination. The enhancing illumination may be directed along an illumination path that is collinear to the output illumination path of the output illumination so that the enhancing illumination is combined with the output illumination, thereby enhancing the output illumination at the one or more selected wavelengths.
    Type: Application
    Filed: February 22, 2019
    Publication date: September 19, 2019
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Derstine
  • Publication number: 20180172240
    Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.
    Type: Application
    Filed: February 13, 2018
    Publication date: June 21, 2018
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Rudolf Brunner
  • Patent number: 9941655
    Abstract: A system for generating high power broadband light includes multiple light-sustained plasma light sources. Each one of the light-sustained sources includes a pumping source, a gas containment structure for containing gas and configured to receive pumping illumination from the pumping source and a parabolic reflector element arranged to collect at least a portion of the broadband radiation emitted by the generated plasma and form a collimated broadband radiation output. The system also including a set of optical elements configured to combine the collimated broadband outputs from the parabolic reflector elements of the multiple light-sustained plasma light sources into an aggregated broadband beam.
    Type: Grant
    Filed: March 24, 2015
    Date of Patent: April 10, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Anant Chimmalgi, Rahul Yadav, Anatoly Shchemelinin, Ilya Bezel, Matthew Derstine
  • Patent number: 9927094
    Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma, the plasma bulb being transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.
    Type: Grant
    Filed: January 15, 2013
    Date of Patent: March 27, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Rudolf Brunner
  • Patent number: 9887076
    Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a bulb-less gas containment structure, and a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb-less gas containment structure. Further, the plasma is generated within a concave region of the collector element, where the collector element includes an opening through the collector element for propagating a portion of a plume of the plasma from a first region of the bulb-less gas containment structure to a second region of the bulb-less gas containment structure, wherein the first region of the bulb-less gas containment structure and the second region of the bulb-less gas containment structure are at least partially separated by a surface of the collector element.
    Type: Grant
    Filed: July 11, 2016
    Date of Patent: February 6, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Kenneth P. Gross, David W. Shortt, Wei Zhao, Anant Chimmalgi, Jincheng Wang
  • Patent number: 9775226
    Abstract: A system for forming a light-sustained plasma capable of emitting vacuum ultraviolet light includes an illumination source configured to generate illumination, a plasma cell including a transmission element having one or more openings, one or more flanges disposed at the openings of the transmission element and configured to enclose the internal volume of the transmission element in order to contain a volume of gas within the plasma cell. The system further includes a collector element arranged to focus the illumination from the illumination source into the volume of gas to generate a plasma within the volume of gas contained within the plasma cell. Further, the plasma emits broadband radiation including at least vacuum ultraviolet radiation. In addition, the transmission element of the plasma cell is transparent to the illumination generated by the illumination source and at least the vacuum ultraviolet radiation emitted by the plasma.
    Type: Grant
    Filed: March 31, 2014
    Date of Patent: September 26, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine
  • Patent number: 9723703
    Abstract: A laser-sustained plasma light source for transverse plasma pumping includes a pump source configured to generate pumping illumination, one or more illumination optical elements and a gas containment structure configured to contain a volume of gas. The one or more illumination optical elements are configured to sustain a plasma within the volume of gas of the gas containment structure by directing pump illumination along a pump path to one or more focal spots within the volume of gas. The one or more collection optical elements are configured to collect broadband radiation emitted by the plasma along a collection path. Further, the illumination optical elements are configured to define the pump path such that pump illumination impinges the plasma along a direction transverse to a direction of propagation of the emitted broadband light of the collection path such that the pump illumination is substantially decoupled from the emitted broadband radiation.
    Type: Grant
    Filed: March 31, 2015
    Date of Patent: August 1, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Richard Solarz, Sebaek Oh, Matthew Derstine
  • Patent number: 9721761
    Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.
    Type: Grant
    Filed: February 15, 2016
    Date of Patent: August 1, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Lauren Wilson, Anant Chimmalgi, Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Gildardo Delgado
  • Patent number: 9655225
    Abstract: A plasma cell for controlling convection includes a transmission element configured to receive illumination from an illumination source in order to generate a plasma within a plasma generation region of the volume of gas. The transmission element of the plasma cell is at least partially transparent to at least a portion of the illumination generated by the illumination source and at least a portion of broadband radiation emitted by the plasma. The plasma cell also includes one or more gas return channels formed within the transmission element for transferring gas from a region above the plasma generation region to a region below the plasma generation region.
    Type: Grant
    Filed: November 9, 2015
    Date of Patent: May 16, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine
  • Patent number: 9558858
    Abstract: The inspection of a sample with VUV light from a laser sustained plasma includes generating pumping illumination including a first selected wavelength, or range of wavelength, containing a volume of gas suitable for plasma generation, generating broadband radiation including a second selected wavelength, or range of wavelengths, by forming a plasma within the volume of gas by focusing the pumping illumination into the volume of gas, illuminating a surface of a sample with the broadband radiation emitted from the plasma via an illumination pathway, collecting illumination from a surface of the sample, focusing the collected illumination onto a detector via a collection pathway to form an image of at least a portion of the surface of the sample and purging the illumination pathway and/or the collection pathway with a selected purge gas.
    Type: Grant
    Filed: August 13, 2014
    Date of Patent: January 31, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: David W. Shortt, Steven R. Lange, Matthew Derstine, Kenneth P. Gross, Wei Zhao, Ilya Bezel, Anatoly Shchemelinin
  • Patent number: 9534848
    Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.
    Type: Grant
    Filed: August 26, 2013
    Date of Patent: January 3, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Erik Kim, Rudolf Brunner, Quang Giang, Lauren Wilson, Ken Gross, Ilya Bezel, Dan Scott, Younus Vora, Matthew Derstine, Cedric Lasfargues