Abstract: The train detection system comprises a wireless communication network further comprising train detection modules attached to catenary poles at the entrance and exit of the railyard. Each train detection module is equipped with a plurality of diverse sensors configured to detect trains and other on-track vehicles. The diverse sensors are simultaneously active and work together for detecting an approaching or leaving train. The train detection modules generate train alerts which are transmitted wirelessly over the wireless communication network. Each of the railyard workers wears a personal alert device capable of wirelessly connecting with the train detection modules and receiving the train alerts over the said wireless communication network. The train alert modules are capable of transmitting alerts wirelessly to personal alert devices and other train alert modules. Train alert modules are capable of generating audio visual warnings for any personnel which may not be equipped with personal alert module.

Abstract: A method of cleaning a chamber of a plasma processing device to remove depositions formed after the plasma processing device has been used to deposit a dielectric material including silicon and carbon by introducing a first cleaning gas mixture into the chamber through a first gas inlet in a first introducing step; generating a first plasma in the chamber from the first cleaning gas mixture in a first cleaning step; introducing a second cleaning gas mixture into a remote plasma source in a second introducing step; generating a second plasma in the remote plasma source from a second cleaning gas mixture in a remote plasma generating step; and performing a second cleaning step by allowing fluorine radicals from the second plasma to enter the chamber and introducing a third cleaning gas mixture into the chamber at the same time as the fluorine radicals from the second plasma.

Abstract: The train detection system comprises a wireless communication network further comprising train detection modules attached to catenary poles at the entrance and exit of the railyard. Each train detection module is equipped with a plurality of diverse sensors configured to detect trains and other on-track vehicles. The diverse sensors are simultaneously active and work together for detecting an approaching or leaving train. The train detection modules generate train alerts which are transmitted wirelessly over the wireless communication network. Each of the railyard workers wears a personal alert device capable of wirelessly connecting with the train detection modules and receiving the train alerts over the said wireless communication network. The train alert modules are capable of transmitting alerts wirelessly to personal alert devices and other train alert modules. Train alert modules are capable of generating audio visual warnings for any personnel which may not be equipped with personal alert module.