Abstract: A polishing agent delivery system for a wafer processing system includes multiple tanks each of which can hold a supply of a respective polishing agent constituent, such as a slurry constituent, a buffing agent or a cleansing agent. The system also includes multiple containers, each one of which can hold a respective polishing agent constituent. Additionally, each container has a motor-driven piston that can be operated to cause the respective polishing agent constituent to be dispensed from the container to a wafer processing station and which can be operated to cause additional polishing agent constituent to be drawn into the container from a corresponding one of the tanks. The apparatus also includes a controller for controlling a respective rate of linear displacement of each motor-driven piston. Stepper motors or servo-motors can be used. The system allows changes to slurry mixtures to be made quickly and efficiently, and different slurry or buffing mixtures can be used for different polishing stations.

Abstract: An apparatus and method are provided for servicing an irradiated nuclear control rod underwater in a reactor building servicing pool. A turntable containing a plurality of spaced apart tools is positioned adjacent to the control rod. A first tool aligns the turntable relative to the radioactive roller mounted to the control rod by a radioactive pin therethrough. The turntable is indexable to position a second tool adjacent to the radioactive roller and pin, with the second tool being effective for freeing the radioactive pin from the control rod. The turntable is indexable for positioning a third tool adjacent to the radioactive roller and pin for removing the radioactive pin and the roller from the control rod. In further embodiments of the invention the turntable is further indexable for positioning a fourth tool adjacent to the control rod for reaming the pin aperture through which the radioactive pin was mounted.

Abstract: A dielectric tape of FEP (polyfluoroethylenepropylene) Teflon is electrostatically charged to a high level charge density using a motor driven capstan on which the tape is moved at a controlled velocity past a sponge assembly charged by a high DC voltage. The sponge assembly is wetted with a dielectric fluid mixture of methyl alcohol, ethyl alcohol and acetone. By endosmosis, a bead of fluid forms between the sponge and the FEP Teflon tape causing the fluid to be evenly distributed on the tape. An air blower directed onto the surface of the tape drys the tape as it passes by.