Patents by Inventor Matthew J. Bombardier

Matthew J. Bombardier has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Centering fixture for electrostatic chuck system
    Patent number: 9966292
    Abstract: A centering fixture for centering a wafer on a chuck is provided. The centering fixture includes a body including an upper surface, a lower surface, an inner periphery and an outer periphery. A chuck seat is positioned in a lower portion of the inner periphery and configured to mate the body with the chuck. A wafer seat is positioned in an upper portion of the inner periphery above the chuck seat, the wafer seat configured to receive and center the wafer on the chuck. The centering fixture ensures centering of the wafer relative to the chuck for automated handling system calibration. The wafer, body, chuck, chuck seat and wafer seat can be circular.
    Type: Grant
    Filed: July 12, 2016
    Date of Patent: May 8, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Donald R. Boyea, Jr., Matthew J. Bombardier
  • CENTERING FIXTURE FOR ELECTROSTATIC CHUCK SYSTEM
    Publication number: 20180019147
    Abstract: A centering fixture for centering a wafer on a chuck is provided. The centering fixture includes a body including an upper surface, a lower surface, an inner periphery and an outer periphery. A chuck seat is positioned in a lower portion of the inner periphery and configured to mate the body with the chuck. A wafer seat is positioned in an upper portion of the inner periphery above the chuck seat, the wafer seat configured to receive and center the wafer on the chuck. The centering fixture ensures centering of the wafer relative to the chuck for automated handling system calibration. The wafer, body, chuck, chuck seat and wafer seat can be circular.
    Type: Application
    Filed: July 12, 2016
    Publication date: January 18, 2018
    Inventors: Donald R. Boyea, Jr., Matthew J. Bombardier