Patents by Inventor Matthew J. Paschal

Matthew J. Paschal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mask Alignment, Rotation and Bias Monitor Utilizing Threshold Voltage Dependence
    Publication number: 20110304350
    Abstract: The present invention provides a method and apparatus for measuring alignment, rotation and bias of mask layers in semiconductor manufacturing by examining threshold voltage variation.
    Type: Application
    Filed: June 11, 2010
    Publication date: December 15, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Todd A. Christensen, Matthew J. Paschal, John E. Sheets, II