Abstract: A system, apparatus, and method for determining a velocity. A voltage is detected for a planar sensor array while the planar sensor array is moving though a magnetic field, wherein the planar sensor array comprises conductive channels formed in a substrate, wherein the conductive channels are connected in series, and wherein the voltage is generated by the planar sensor array in response to a movement of the planar sensor array through the magnetic field and wherein the voltage is proportional to a velocity of the planar sensor array moving through the magnetic field. The velocity of the planar sensor array is determined using the voltage detected for the conductive channels.

Abstract: A self-calibration method for an accelerometer having a proof mass separated by a gap from a drive electrode and a sense electrode includes initializing the accelerometer to resonate, applying a first bias voltage to the sense electrode and a second bias voltage to the drive electrode to obtain a first scale factor, measuring a first acceleration over a first time interval, swapping the first bias voltage on the sense electrode with the second bias voltage previously on the drive electrode and the second bias voltage on the drive electrode with the first bias voltage previously on the sense electrode so that a bias voltage on the sense electrode is set to the second bias voltage and a bias voltage on the drive electrode is set to the second bias voltage to obtain a second scale factor, measuring a second acceleration over a second time interval, and calculating a true acceleration.

Abstract: A stress isolating interposer includes: an outer pad; an inner pad configured to accommodate a positional sensor is mounted; and a stress isolating structure coupling the outer pad and the inner pad to each other. The outer pad, the stress isolating structure, and the inner pad are a monolithic structure.

Abstract: A sensing array includes a plurality of pixels, one pixel of which includes: a sensor, the sensor including a first electrode, a second electrode, and an atomic defect site configured to be excited by light of a first frequency; a light source below the sensor and configured to emit light of the first frequency toward the defect site; and a radio frequency (RF) source below the sensor and configured to provide a first voltage to the first electrode, a second voltage to the second electrode, and an RF signal to the sensor, wherein the sensor is configured to sense a magnitude of a physical parameter by generating a photocurrent corresponding to a magnitude of a physical parameter and a differential between the first and second voltages, when excited by the light of the first frequency and affected by the RF signal.

Abstract: An atomic defect sensor for measuring a magnitude of a physical parameter comprises an optical waveguide comprising an atomic defect site located within the optical waveguide, the optical waveguide being configured to guide an optical signal toward the atomic defect site, a first doped fin integrated with the optical waveguide at a first side of the optical waveguide, and a second doped fin integrated with the optical waveguide at a second side of the optical waveguide, wherein the atomic defect site is configured to be energetically stimulated by the optical signal in the presence of an RF signal, and to generate a photocurrent corresponding to the magnitude of the physical parameter and a voltage differential between the first and second doped fins.