Patents by Inventor Matthew JESTER

Matthew JESTER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190214283
    Abstract: A process system of performing a fabrication process on a wafer includes a wafer storage cassette, process chambers, a transfer chamber having a body and a lid that detachably covers the body, a frame configured to support the transfer chamber, and a lifting tool connected to the lid and extended from the lid over a portion of the frame. The body of the transfer chamber is connected to the wafer storage cassette and the plurality of process chambers so that the wafer is transferred from the wafer storage cassette through the body of the transfer chamber to one of the process chambers.
    Type: Application
    Filed: January 10, 2018
    Publication date: July 11, 2019
    Inventors: Matthew JESTER, Robert BELL, Robert STEBBINS, Soren SPRISSLER