Patents by Inventor Matthew LaBerge

Matthew LaBerge has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Support for semiconductor substrate
    Patent number: 9401299
    Abstract: A moveable semiconductor substrate support includes a control device receiving data from one or more sensors and providing control signals to one or more actuators. The control device is coupled to and moves with the moveable substrate support to facilitate flexible and complex operation of the substrate support itself.
    Type: Grant
    Filed: September 26, 2011
    Date of Patent: July 26, 2016
    Assignee: Rudolph Technologies, Inc.
    Inventors: Ralph Sowden, Kevin Barr, Matthew Laberge, Troy Palm, Dennis Benson
  • SUPPORT FOR SEMICONDUCTOR SUBSTRATE
    Publication number: 20130330154
    Abstract: A moveable semiconductor substrate support includes a control device receiving data from one or more sensors and providing control signals to one or more actuators. The control device is coupled to and moves with the moveable substrate support to facilitate flexible and complex operation of the substrate support itself.
    Type: Application
    Filed: September 26, 2011
    Publication date: December 12, 2013
    Inventors: Ralph Sowden, Kevin Barr, Matthew Laberge, Troy Palm, Dennis Benson
  • Adjustable film frame aligner
    Patent number: 8097966
    Abstract: A film frame aligner for automatically aligning a film frame includes a film frame support, a film frame pusher for pushing the film frame, and a film frame location mechanism for locating at least one notch in the film frame.
    Type: Grant
    Filed: April 30, 2007
    Date of Patent: January 17, 2012
    Assignee: Rudolph Technologies, Inc.
    Inventors: Steve Herrmann, Willard Charles Raymond, Matthew LaBerge
  • Adjustable film frame aligner
    Patent number: 7316938
    Abstract: A film frame aligner for automatically aligning a film frame includes a film frame support, a film frame pusher for pushing the film frame, and a film frame location mechanism for locating at least one notch in the film frame.
    Type: Grant
    Filed: July 14, 2004
    Date of Patent: January 8, 2008
    Assignee: Rudolph Technologies, Inc.
    Inventors: Steve Herrmann, Willard Charles Raymond, Matthew LaBerge
  • ADJUSTABLE FILM FRAME ALIGNER
    Publication number: 20070202420
    Abstract: A film frame aligner for automatically aligning a film frame includes a film frame support, a film frame pusher for pushing the film frame, and a film frame location mechanism for locating at least one notch in the film frame.
    Type: Application
    Filed: April 30, 2007
    Publication date: August 30, 2007
    Inventors: Steve Herrmann, Willard Raymond, Matthew LaBerge
  • Adjustable film frame aligner
    Publication number: 20050012229
    Abstract: A film frame aligner for automatically aligning a film frame includes a film frame support, a film frame pusher for pushing the film frame, and a film frame location mechanism for locating at least one notch in the film frame.
    Type: Application
    Filed: July 14, 2004
    Publication date: January 20, 2005
    Inventors: Steve Herrmann, Willard Raymond, Matthew LaBerge