Patents by Inventor Matthew Panzer

Matthew Panzer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200039118
    Abstract: An apparatus useful for rapidly producing at least one object having a contoured surface portion from a light-polymerizable resin is provided.
    Type: Application
    Filed: July 30, 2019
    Publication date: February 6, 2020
    Inventors: Matthew Panzer, John R. Tumbleston
  • Patent number: 10522340
    Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.
    Type: Grant
    Filed: July 23, 2018
    Date of Patent: December 31, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Lauren Wilson, Anant Chimmalgi, Matthew Panzer, Ilya Bezel
  • Patent number: 10520741
    Abstract: A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.
    Type: Grant
    Filed: July 17, 2017
    Date of Patent: December 31, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Anatoly Shchemelinin, Ilya Bezel, Matthew Panzer, Eugene Shifrin
  • Patent number: 10381216
    Abstract: An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.
    Type: Grant
    Filed: December 21, 2018
    Date of Patent: August 13, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer
  • Patent number: 10283342
    Abstract: A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.
    Type: Grant
    Filed: November 23, 2016
    Date of Patent: May 7, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Kenneth P. Gross, Matthew Panzer, Anant Chimmalgi, Lauren Wilson, Joshua Wittenberg
  • Publication number: 20190115203
    Abstract: An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.
    Type: Application
    Filed: December 21, 2018
    Publication date: April 18, 2019
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer
  • Patent number: 10217625
    Abstract: An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.
    Type: Grant
    Filed: March 8, 2016
    Date of Patent: February 26, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer
  • Publication number: 20180370139
    Abstract: Resin products useful for making three-dimensional objects by additive manufacturing, as well as methods of making the same, and of using the same, are provided. The resin products may include additional oxygen solubilized in a resin in addition to that amount of oxygen otherwise absorbed by the resin from the ambient atmosphere prior to or during packaging of the resin in a container, less nitrogen solubilized in the resin as compared to that amount of nitrogen otherwise absorbed by the resin from the ambient atmosphere prior to or during packaging of the resin in a container, or both.
    Type: Application
    Filed: June 19, 2018
    Publication date: December 27, 2018
    Inventor: Matthew Panzer
  • Patent number: 10163620
    Abstract: An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.
    Type: Grant
    Filed: March 8, 2016
    Date of Patent: December 25, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer
  • Publication number: 20180330937
    Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.
    Type: Application
    Filed: July 23, 2018
    Publication date: November 15, 2018
    Inventors: Lauren Wilson, Anant Chimmalgi, Matthew Panzer, Ilya Bezel
  • Patent number: 10115847
    Abstract: A method of preparing a cupric oxide semiconductor. The method includes providing a substrate having a first surface, forming a cuprous oxide layer on the first surface, converting the cuprous oxide layer into a cupric oxide layer via an oxidation reaction, and depositing additional cupric oxide on the cupric oxide layer, which serves as a seed layer, to yield a cupric oxide film, thereby obtaining a cupric oxide semiconductor. Also disclosed are a cupric oxide semiconductor thus prepared and a photovoltaic device including it.
    Type: Grant
    Filed: April 2, 2015
    Date of Patent: October 30, 2018
    Assignee: Trustees of Tufts College
    Inventors: Changqiong Zhu, Matthew Panzer
  • Patent number: 10044062
    Abstract: An ionic material that contains a crosslinked polydimethylsiloxane network and an ionic liquid and, optionally, a lithium salt. Also disclosed are a methods of preparing the above-described ionic material, as well as a battery and a capacitor each including the ionic material as an electrolyte.
    Type: Grant
    Filed: December 15, 2014
    Date of Patent: August 7, 2018
    Assignee: Tufts University
    Inventors: Ariel Horowitz, Matthew Panzer
  • Patent number: 10032620
    Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.
    Type: Grant
    Filed: April 29, 2015
    Date of Patent: July 24, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Lauren Wilson, Anant Chimmalgi, Matthew Panzer, Ilya Bezel
  • Publication number: 20180172240
    Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.
    Type: Application
    Filed: February 13, 2018
    Publication date: June 21, 2018
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Rudolf Brunner
  • Publication number: 20180126630
    Abstract: A method of forming a three-dimensional object can be carried out by: (a) providing a carrier and an optically transparent member having a build surface, the carrier and the build surface defining a build region therebetween; (b) filling the build region with a polymerizable liquid, the polymerizable liquid comprising: (i) a polymerizable component; (ii) upconverting particles that are excited by light at a first wavelength and upon excitation emit light at a second wavelength that is shorter than the first wavelength; and (iii) a photoiniator that catalyzes polymerization of the polymerizable component upon excitation by light at the second wavelength; (c) irradiating the build region through the optically transparent member with an excitation light at the first wavelength, and optionally but in some embodiments preferably also advancing the carrier away from the build surface, wherein the excitation light is temporally and/or spatially modulated, to thereby form the three-dimensional object from the polymer
    Type: Application
    Filed: November 2, 2017
    Publication date: May 10, 2018
    Inventors: Matthew Panzer, John R. Tumbleston
  • Patent number: 9927094
    Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma, the plasma bulb being transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.
    Type: Grant
    Filed: January 15, 2013
    Date of Patent: March 27, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Rudolf Brunner
  • Publication number: 20170315369
    Abstract: A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.
    Type: Application
    Filed: July 17, 2017
    Publication date: November 2, 2017
    Inventors: Anatoly Shchemelinin, Ilya Bezel, Matthew Panzer, Eugene Shifrin
  • Patent number: 9709811
    Abstract: A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.
    Type: Grant
    Filed: August 13, 2014
    Date of Patent: July 18, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Anatoly Shchemelinin, Ilya Bezel, Matthew Panzer, Eugene Shifrin
  • Publication number: 20170164457
    Abstract: A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.
    Type: Application
    Filed: November 23, 2016
    Publication date: June 8, 2017
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Kenneth P. Gross, Matthew Panzer, Anant Chimmalgi, Lauren Wilson, Joshua Wittenberg
  • Publication number: 20170059490
    Abstract: A system for illuminating a sample with a spectrally filtered illumination source includes an illumination source configured to generate a beam of illumination having a first set of wavelengths. In addition, the system includes a wavelength filtering sub-system, a sample stage, an illumination sub-system, a detector, and an objective to focus illumination from the surface of one or more samples and focus the collected illumination to the detector. Further, the wavelength filtering sub-system includes one or more first dispersive elements positioned to introduce spatial dispersion into the beam, a spatial filter element, and one or more dispersive elements positioned to remove spatial dispersion from the beam. The spatial filter element is further positioned to pass at least a portion of the beam including a second set of wavelengths, wherein the second set of wavelengths is a subset of the first set of wavelengths.
    Type: Application
    Filed: August 28, 2015
    Publication date: March 2, 2017
    Inventors: Wei Zhao, Kenneth P. Gross, Ilya Bezel, Matthew Panzer