Patents by Inventor Matthew R. Jeffers

Matthew R. Jeffers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for thermal processing with micro-environment
    Patent number: 8420981
    Abstract: A substrate thermal processing system. The system has at least one substrate holding module having a housing configured for holding an isolated environment therein. A substrate heater is located in the housing and has a substrate heating surface. A substrate cooler is located in the housing and having a substrate cooling surface. A gas feed opening into the housing and feeding inert or reducing gas into the housing when the substrate is heated by the heating surface. A gas restrictor is within the housing restricting the fed gas between the substrate heating surface and a surrounding atmospheric region substantially surrounding the substrate heating surface in the housing and forming an aperture through which the fed gas communicates with the atmospheric region.
    Type: Grant
    Filed: November 13, 2009
    Date of Patent: April 16, 2013
    Assignee: Tel Nexx, Inc.
    Inventors: Daniel Goodman, Arthur Keigler, David G. Guarnaccia, Matthew R. Jeffers
  • Apparatus for thermal processing with micro-environment
    Publication number: 20110114623
    Abstract: A substrate thermal processing system. The system has at least one substrate holding module having a housing configured for holding an isolated environment therein. A substrate heater is located in the housing and has a substrate heating surface. A substrate cooler is located in the housing and having a substrate cooling surface. A gas feed opening into the housing and feeding inert or reducing gas into the housing when the substrate is heated by the heating surface. A gas restrictor is within the housing restricting the fed gas between the substrate heating surface and a surrounding atmospheric region substantially surrounding the substrate heating surface in the housing and forming an aperture through which the fed gas communicates with the atmospheric region.
    Type: Application
    Filed: November 13, 2009
    Publication date: May 19, 2011
    Applicant: Nexx Systems, Inc
    Inventors: Daniel Goodman, Arthur Keigler, David G. Guarnaccia, Matthew R. Jeffers