Patents by Inventor Matthew Stephen Buynoski

Matthew Stephen Buynoski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • XE preamorphizing implantation
    Patent number: 6624037
    Abstract: A SOI substrate is preamorphized by ion implanting Xe prior to forming source/drain extensions and source/drain regions, thereby virtually eliminating or significantly reducing floating body effects. Other aspects comprise ion implanting a Xe2+ into a bulk silicon or SOI substrate to effect preeamorphization prior to forming source/drain extensions and regions having shallow junctions with reduced vertical and lateral straggle.
    Type: Grant
    Filed: August 1, 2001
    Date of Patent: September 23, 2003
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Matthew Stephen Buynoski, Che-Hoo Ng
  • XE preamorphizing implantation
    Publication number: 20030027381
    Abstract: A SOI substrate is preamorphized by ion implanting Xe prior to forming source/drain extensions and source/drain regions, thereby virtually eliminating or significantly reducing floating body effects. Other aspects comprise ion implanting a Xe2+ into a bulk silicon or SOI substrate to effect preeamorphization prior to forming source/drain extensions and regions having shallow junctions with reduced vertical and lateral straggle.
    Type: Application
    Filed: August 1, 2001
    Publication date: February 6, 2003
    Applicant: Advanced Micro Devices, Inc.
    Inventors: Matthew Stephen Buynoski, Che-Hoo Ng