Patents by Inventor Matthew T. Spuller

Matthew T. Spuller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas-expanded liquids, methods of use thereof, and systems using gas-expanded liquids for cleaning integrated circuits
    Patent number: 6786977
    Abstract: Gas-expanded liquids, methods of use thereof, and systems of using gas-expanded liquids are provided. One exemplary system, among others, includes: a gas-expanded liquid system comprising a gas and a liquid, wherein the gas-expanded liquid system is adapted to generate a gas-expanded liquid; and a substrate handling system adapted to position a substrate having a photoresist layer so that the gas-expanded liquid can be made to contact the substrate to remove the photoresist layer.
    Type: Grant
    Filed: November 21, 2003
    Date of Patent: September 7, 2004
    Assignee: Georgia Tech Research Corporation
    Inventors: Matthew T. Spuller, Dennis W. Hess
  • Gas-expanded liquids, methods of use thereof, and systems using gas-expanded liquids for cleaning integrated circuits
    Publication number: 20040103924
    Abstract: Gas-expanded liquids, methods of use thereof, and systems of using gas-expanded liquids are provided. One exemplary system, among others, includes: a gas-expanded liquid system comprising a gas and a liquid, wherein the gas-expanded liquid system is adapted to generate a gas-expanded liquid; and a substrate handling system adapted to position a substrate having a photoresist layer so that the gas-expanded liquid can be made to contact the substrate to remove the photoresist layer.
    Type: Application
    Filed: November 21, 2003
    Publication date: June 3, 2004
    Inventors: Matthew T. Spuller, Dennis W. Hess