Abstract: A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.

Abstract: A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having multiple single-crystal layers, including at least a first layer and a second layer that is formed over and tilted relative to the first layer. The X-rays that are diffracted from each of the first and second layers are sensed simultaneously while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including at least a first diffraction peak due to the first layer and a second diffraction peak due to the second layer. The diffraction spectrum is analyzed so as to identify a characteristic of at least the second layer.

Abstract: A method for analysis includes directing a converging beam of X-rays toward a surface of a sample and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum of the sample. The diffraction spectrum is corrected to compensate for a non-uniform property of the converging beam.

Abstract: A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.

Abstract: An x-ray detection system (400) for detecting a deflected X-ray beam (206) from a sample (204) comprising a detector (402) having an array of pixels enabled to receive the X-ray beam area at the detector (402), a image processing means (404) for reading out a sample image from the detector (402) and a region of interest extraction means (406, 408) for extracting a sub-image of a first area from the sample image. The sub-image is typically a narrow strip of the array of pixels to obtain a “virtual slit” image or a circular area of the array of pixels to obtain a “virtual aperture” image. More than one sub-image may be extracted from the sample image taken from the detector (402).

Abstract: An X-ray source (24), a detector (26) and a specimen (20) are mutually positioned by an apparatus which includes two spaced, parallel linear actuators (32,36) each movable along a gantry (34). The source (24) and detector (26) can be moved vertically by the actuators (32,36) and rotationally by rotary actuators (28,30). Equivalent arrangements are also described.

Abstract: An X-ray topographic system comprises an X-ray generator producing a beam of X-rays impinging on a limited area of a sample such as a silicon wafer. A solid state detector is positioned to intercept the beam after transmission through or reflection from the sample. The detector has an array of pixels matching the beam area to produce a digital image of said limited area. Relative stepping motion between the X-ray generator and the sample produces a series of digital images which are combined together. In optional embodiments, an X-ray optic is interposed to produce a parallel beam to avoid image doubling, or the effect of image doubling is removed by software.

Abstract: An X-ray topographic system comprises an X-ray generator producing a beam of X-rays impinging on a limited area of a sample such as a silicon wafer. A solid state detector is positioned to intercept the beam after transmission through or reflection from the sample. The detector has an array of pixels matching the beam area to produce a digital image of said limited area. Relative stepping motion between the X-ray generator and the sample produces a series of digital images which are combined together. In optional embodiments, an X-ray optic is interposed to produce a parallel beam to avoid image doubling, or the effect of image doubling is removed by software.

Abstract: Evolutionary algorithms are used to find a global solution to the fitting of experimental X-ray scattering data to simulated models. A recombination operator combines two or more parameter vectors from one iteration of simulated scattering data to form a new parameter vector for the next iteration, in a manner such that there is a high probability that the new parameter will better fit the experimental data than any of the parent parameters. A mutation operator perturbs the value of a parent vector, to permit new regions of the error function to be examined, and thereby avoid settling on local minima. The natural selection guarantees that the parameter vectors with the best fitness will be propagated into future iterations.