Patents by Inventor Matthias HEYMANNS

Matthias HEYMANNS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210340663
    Abstract: An apparatus for processing a substrate in a vacuum chamber is described. The apparatus includes a first carrier transport system for transporting a first carrier along a first transport path in a first direction and a second carrier transport system for transporting a second carrier along a second transport path in the first direction. Further, the apparatus includes a measurement system for measuring a distance between the first carrier and the second carrier. The distance is perpendicular to the first direction.
    Type: Application
    Filed: April 3, 2018
    Publication date: November 4, 2021
    Inventors: Matthias HEYMANNS, Jens GRÖLS
  • Publication number: 20210335640
    Abstract: A holding device for holding a carrier or a component in a vacuum chamber is described. The holding device includes one or more electric controllable holding elements, a housing for at least partially housing the one or more electric controllable holding elements, the housing having a reception for the one or more electric controllable holding elements, a sealing for providing an air-tight sealing between the housing and the one or more electric controllable holding elements being arranged in the reception; and an air-tight connection for an electric supply line for the one or more electric controllable holding elements. Further, a method of producing a holding device, an apparatus for handling a carrier in a vacuum chamber, and a vacuum deposition system are described.
    Type: Application
    Filed: July 26, 2018
    Publication date: October 28, 2021
    Inventor: Matthias HEYMANNS
  • Publication number: 20210328146
    Abstract: An apparatus for carrier alignment in a vacuum chamber is described. The apparatus includes a support extending in a first direction in the vacuum chamber, a magnetic levitation system configured to transport a first carrier in the first direction in the vacuum chamber, the magnetic levitation system comprising at least one magnet unit, and an alignment system for aligning the first carrier. The at least one magnet unit and the alignment system are rigidly fixed to the support. Further, a vacuum system and a method of aligning a carrier are described.
    Type: Application
    Filed: April 3, 2018
    Publication date: October 21, 2021
    Inventors: Matthias HEYMANNS, Tommaso VERCESI, Stefan BANGERT, Ulrich OLDENDORF, Achim HUWIG
  • Publication number: 20210328147
    Abstract: A carrier for supporting a substrate or a mask in a vacuum chamber in or parallel to a first plane is provided. The carrier comprises a clamping device for fixing the carrier to an aligning device and a mechanical motion element connecting the clamping device to the carrier, the mechanical motion element allowing for relative movement of the clamping device and the carrier for at least one degree of freedom and providing a fixed connection between the clamping device and the carrier for at least another degree of freedom.
    Type: Application
    Filed: April 3, 2018
    Publication date: October 21, 2021
    Inventors: Tommaso VERCESI, Matthias HEYMANNS
  • Publication number: 20200251691
    Abstract: An apparatus for vacuum processing of a substrate is described. The apparatus includes a vacuum chamber, a substrate transport assembly, a mask transport assembly, and an alignment system having an actuator and a mechanical isolation element between the actuator and the vacuum chamber.
    Type: Application
    Filed: April 12, 2017
    Publication date: August 6, 2020
    Inventor: Matthias HEYMANNS
  • Publication number: 20200083452
    Abstract: The present disclosure provides an apparatus (200) for vacuum processing of a substrate (10). The apparatus (200) includes a vacuum chamber, a first track arrangement (110) configured for transportation of a substrate carrier (120), a second track arrangement (130) configured for transportation of a mask carrier (140), and a holding arrangement configured for positioning the substrate carrier (120) and the mask carrier (140) with respect to each other. The first track arrangement (110) includes a first portion configured to support the substrate carrier (120) at a first end (12) of the substrate (10) and a second portion configured to support the substrate carrier (120) at a second end (14) of the substrate (10) opposite the first end (12) of the substrate (10).
    Type: Application
    Filed: February 24, 2017
    Publication date: March 12, 2020
    Applicants: Applied Materials, Inc., Applied Materials, Inc.
    Inventors: Matthias HEYMANNS, Stefan BANGERT, Oliver HEIMEL, Andreas SAUER, Sebastian Gunther ZANG
  • Publication number: 20190368024
    Abstract: A positioning arrangement for positioning a substrate carrier and a mask carrier in a vacuum chamber is described. The positioning arrangement comprising a first track extending in a first direction and configured transportation of the substrate carrier configured for holding a substrate having a substrate surface, a second track extending in the first direction and configured for transportation of the mask carrier, wherein the first track and the second track are offset by an offset distance in a plane coplanar with the substrate surface, and a holding arrangement configured for holding the mask carrier, wherein the holding arrangement is arranged between the first track and the second track.
    Type: Application
    Filed: February 24, 2017
    Publication date: December 5, 2019
    Inventors: Matthias HEYMANNS, Oliver HEIMEL, Stefan BANGERT, Jürgen HENRICH, Andreas SAUER, Tommaso VERCESI
  • Patent number: 7884851
    Abstract: Apparatus and methods of processing audio files used by the apparatus are provided. The apparatus includes a camera arrangement, a storage arrangement, and a user input arrangement. The storage arrangement can store one or more audio files. A user may prepare the camera arrangement to capture an image of a subject. A selected audio file arrangement can be played through a sound generation arrangement audible to the person whose image is being captured, in response to an activation of the user input arrangement of the apparatus. After the audio file is played, the camera apparatus captures the image. One exemplary embodiment includes a wireless device, and the audio files are downloaded from a vendor using a wireless network and a computer network. In addition or alternatively, a display arrangement can be provided that displays an interactive menu for selection of options related to the audio files.
    Type: Grant
    Filed: September 29, 2004
    Date of Patent: February 8, 2011
    Assignee: New York University
    Inventor: Matthias Heymann
  • Publication number: 20060066732
    Abstract: Apparatus and methods of processing audio files used by the apparatus are provided. The apparatus includes a camera arrangement, a storage arrangement, and a user input arrangement. The storage arrangement can store one or more audio files. A user may prepare the camera arrangement to capture an image of a subject. A selected audio file arrangement can be played through a sound generation arrangement audible to the person whose image is being captured, in response to an activation of the user input arrangement of the apparatus. After the audio file is played, the camera apparatus captures the image. One exemplary embodiment includes a wireless device, and the audio files are downloaded from a vendor using a wireless network and a computer network. In addition or alternatively, a display arrangement can be provided that displays an interactive menu for selection of options related to the audio files.
    Type: Application
    Filed: September 29, 2004
    Publication date: March 30, 2006
    Inventor: Matthias Heymann