Abstract: The invention relates to an improved method of analysis using X-ray fluorescence, whereby the X-ray fluorescence is excited by X-radiation. Said X-radiation is generated with an acceleration tension of between 5 and 60 kV and is radiated in an unfiltered form, i.e. without a primary ray filter being positioned in the ray path. The measured data is evaluated according to methods which are known in principle, whereby the area of the deceleration continuum is taken into account in the evaluation. The invention also relates to the application of the improved method for energy dispersive X-ray fluorescence analysis for analyzing chemical substances and to a device for carrying out said method.