Abstract: Disclosed herein are systems, methods, and devices for transporting substrates. A transport device may include a plurality of rotational bodies, where each rotational body is rotatably attached for transporting a rod-shaped workpiece. The transport device may include a rotational excitation element configured to excite rotation of the workpiece when it is supported on one of the plurality of rotational bodies.

Abstract: According to various embodiments, a transporting device may comprise: a plurality of transporting rollers, of which at least two transporting rollers comprises: a glass tube mounted rotatably about an axis of rotation; the glass tube being joined together from a plurality of tube segments, a first tube segment of which is arranged between two second tube segments; and the first tube segment having a plurality of portions, the circumferential surfaces of which are surfaces of rotation with respect to the axis of rotation and/or are arranged coaxially; the plurality of transporting rollers providing by means of the circumferential surfaces a transporting surface for transporting a substrate in plate form and/or in strip form.

Abstract: According to various embodiments, a transporting device may comprise: a plurality of transporting rollers, of which at least two transporting rollers comprises: a glass tube mounted rotatably about an axis of rotation; the glass tube being joined together from a plurality of tube segments, a first tube segment of which is arranged between two second tube segments; and the first tube segment having a plurality of portions, the circumferential surfaces of which are surfaces of rotation with respect to the axis of rotation and/or are arranged coaxially; the plurality of transporting rollers providing by means of the circumferential surfaces a transporting surface for transporting a substrate in plate form and/or in strip form.

Abstract: A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay involved in supplying media, a functional chamber, as a first submodule, is arranged in a first module and provided with an outer interface which is the same for at least a second module.

Abstract: A transport cylinder for the vacuum treatment of substrates includes a roll body and at least one spacer element arranged on the roll body and enveloping the roll body. The spacer element is made of a knitted tube containing metallic or/and metallic threads.

Abstract: A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay involved in supplying media, a functional chamber, as a first sub-module, is arranged in a first module and provided with an outer interface which is the same for at least a second module.

Abstract: In a transport device, which comprises at least one endless conveyor guided around at least two guide rollers, a monitoring appliance for monitoring motion of a guide roller is positioned on at least one of the guide rollers. The monitoring appliance comprises a first contact element disposed on and electrically connected with the guide roller, and a second contact element disposed near the guide roller. The first and second contact elements are arranged relative to one another in such a way that an electrical contact between them occurs with every revolution of the guide roller, such that the electric potential of the guide roller is transmitted to the second contact element. Additionally, a substrate treatment apparatus comprising such transport device is disclosed.

Abstract: In a transport device, which comprises at least one endless conveyor guided around at least two guide rollers, a monitoring appliance for monitoring motion of a guide roller is positioned on at least one of the guide rollers. The monitoring appliance comprises a first contact element disposed on and electrically connected with the guide roller, and a second contact element disposed near the guide roller. The first and second contact elements are arranged relative to one another in such a way that an electrical contact between them occurs with every revolution of the guide roller, such that the electric potential of the guide roller is transmitted to the second contact element. Additionally, a substrate treatment apparatus comprising such transport device is disclosed.